Abstract: In a system for optimizing crop growth, vegetation is cultivated in a contained environment, such as a greenhouse, an underground cavern or other enclosed space. Imaging equipment is positioned within or about the contained environment, to acquire spatially distributed crop growth information, and environmental sensors are provided to acquire data regarding multiple environmental conditions that can affect crop development. Illumination within the contained environment, and the addition of essential nutrients and chemicals are in turn controlled in response to data acquired by the imaging apparatus and environmental sensors, by an “expert system” which is trained to analyze and evaluate crop conditions. The expert system controls the spatial and temporal lighting pattern within the contained area, and the timing and allocation of nutrients and chemicals to achieve optimized crop development.

Abstract: In a system for optimizing crop growth, vegetation is cultivated in a contained environment, such as a greenhouse, an underground cavern or other enclosed space. Imaging equipment is positioned within or about the contained environment, to acquire spatially distributed crop growth information, and environmental sensors are provided to acquire data regarding multiple environmental conditions that can affect crop development. Illumination within the contained environment, and the addition of essential nutrients and chemicals are in turn controlled in response to data acquired by the imaging apparatus and environmental sensors, by an “expert system” which is trained to analyze and evaluate crop conditions. The expert system controls the spatial and temporal lighting pattern within the contained area, and the timing and allocation of nutrients and chemicals to achieve optimized crop development.

Abstract: A photocatalytic fog disseminating system is used to disperse and activate photocatalytic particles. The photocatalytic particles preferably are nanoscale particles of titanium oxide. An aqueous suspension of the photocatalytic particles is dispersed by the system as an aerosol, and a photon source is used to excite the dispersed particles in order to initiate photocatalytic redox reactions that degrade airborne or sedentary organic impurities that come into contact with the aerosol.

Abstract: In a system for optimizing crop growth, vegetation is cultivated in a contained environment, such as a greenhouse, an underground cavern or other enclosed space. Imaging equipment is positioned within or about the contained environment, to acquire spatially distributed crop growth information, and environmental sensors are provided to acquire data regarding multiple environmental conditions that can affect crop development. Illumination within the contained environment, and the addition of essential nutrients and chemicals are in turn controlled in response to data acquired by the imaging apparatus and environmental sensors, by an “expert system” which is trained to analyze and evaluate crop conditions. The expert system controls the spatial and temporal lighting pattern within the contained area, and the timing and allocation of nutrients and chemicals to achieve optimized crop development.

Abstract: An artificial lighting environment is provided. The environment includes an enclosure having an internal growth chamber for containing plants. The enclosure includes an outer surface exposed to an external environment and an inner surface that is exposed to the internal growth chamber and that provides diffuse reflection. A light source illuminates the internal growth chamber, and the inner surface affects light from the light source incident on the inner surface so as to provide substantially uniform and diffuse illumination to plants in the internal growth chamber. This environment provides minimal contamination to the plants contained in the enclosure.

Abstract: Systems and methods for integration of fluorescence and reflective imaging are provided. The system and method can measure reflectance and fluorescence spectrally and spatially with co-registered hyperspectral signatures, and can output a co-registered image from first and second co-registered hyperspectral image data sets.

Abstract: The present invention provides a process chamber and voltage distributive electrode (VDE) which distributes capacitive coupling between an inductive source and a plasma in a process chamber. The VDE is preferably slotted defining energy opaque and energy transparent portions which enable inductive coupling into the chamber while distributing capacitive coupling uniformly over the dielectric window.

Abstract: The present invention provides a process chamber and voltage distributive electrode (VDE) which distributes capacitive coupling between an inductive source and a plasma in a process chamber. The VDE is preferably slotted defining energy opaque and energy transparent portions which enable inductive coupling into the chamber while distributing capacitive coupling uniformly over the dielectric window.

Abstract: The invention provides a system and a method for dynamic RF inductive and capacitive coupling control to improve plasma substrate processing, as well as for achieving contamination and defect reduction. A plasma reactor includes a substrate support disposed in a chamber. An RF coil is disposed adjacent the chamber for inductively coupling RF energy into the chamber. An electrode is disposed adjacent the chamber and has a voltage for capacitively coupling energy into the chamber. The electrode is spaced from the substrate support and the RF coil. An electrode adjusting member is coupled with the electrode for dynamically adjusting the voltage in the electrode to vary the capacitive coupling for improved plasma ignition and plasma stability. A Faraday shield may be placed between the RF coil and the plasma process region in the chamber to suppress capacitive coupling of the RF coil.

Abstract: A closed-loop, dome thermal control apparatus containing a high-volume fan, a heat exchange chamber, and an enclosure that encloses the fan and the heat exchange chamber. The fan blows air over a dome of a semiconductor wafer processing system and through the heat exchange chamber to uniformly control the temperature of a dome of a plasma chamber to prevent particle contamination of the wafer. The enclosure recirculates the temperature controlled air to the fan to form a closed-loop apparatus.

Abstract: Spin-polarized xenon gas is provided in medical-grade purity for use as a contrast medium in MRI studies by use of collision-induced transfer of spin energy to the xenon gas from laser-pumped spin-polarized Rb gas. The Rb gas is provided by thermally vaporizing solid Rb at low pressure in a container having an inside surface coated with a siliconizing agent and exposed to the Rb gas. The combined xenon and Rb gases are separated after transfer of the spin energy in order to provide a sufficient purity of the xenon gas by use of a cryogenic separation process. The Rb gas is removed from the xenon gas and is returned cryogenically to a solid stated to an acceptable level of purity for the xenon gas. The gas may be analyzed optically to measure the remaining Rb concentration.

Abstract: An electrostatic chuck 20 of the present invention is capable of maintaining substantially uniform temperatures across a substrate 30. The chuck 20 comprises an electrostatic member 35 that includes (i) an insulator 45 covering an electrode 40, (ii) a substantially planar and conformal contact surface 50 capable of conforming to a substrate 30, and (iii) conduits 105 terminating at the contact surface 50 for providing heat transfer fluid to the contact surface 50. Application of a voltage to the electrode 40 of the electrostatic member 35 electrostatically holds the substrate 30 on the conformal contact surface 50 to define an outer periphery 110 having (1) leaking portions 115 where heat transfer fluid leaks out, and (2) sealed portions 130 where heat transfer fluid substantially does not leak out.

Abstract: An interferometer comprising a base forming an interior, and first and second optical members located in the interior of the base. The interferometer further comprises a first retainer assembly connecting the first optical member to the base, translation means for moving the second optical member relative the first optical member to vary the distance between the first and second optical members, and a second retainer assembly connecting the second optical member to the translation means. The preferred mechanical configuration and design features of the interferometer produce a very durable instrument that can rapidly scan and accurately filter light across a wide bandwidth. This uniquely designed instrument combines high speed switching, high resolution, wide bandwidth, and adjustable damping capabilities in a durable flight capable instrument.

Abstract: A short path scanning interferometer comprising a base forming an interior, and first and second optical members located in the interior of the base. The interferometer further comprises a first retainer assembly connecting the first optical member to the base, translation means for moving the second optical member relative the first optical member to vary the distance between the first and second optical members, and a second retainer assembly connecting the second optical member to the translation means. The preferred mechanical configuration and design features of the interferometer produce a very durable instrument that can rapidly scan and accurately filter light across a wide bandwidth including short path scanning at low orders. This uniquely designed instrument combines high speed switching, high resolution, wide bandwidth, and adjustable damping capabilities in a durable flight capable instrument.

Abstract: In one aspect, the invention is embodied in a plasma reactor for processing a semiconductor wafer, the reactor having a pedestal focus ring surrounding the periphery of the wafer for reducing the process etch rate near the wafer periphery, and plural openings through the pedestal focus ring which permit passage therethrough of particulate contamination, thereby reducing accumulation of particulate contamination near the wafer periphery. In another aspect, in order to reduce corrosive wear of the chamber walls, a removable gas distribution focus ring shields the side walls of the plasma reactor from reactive gases associated with processing of the semiconductor wafer.

Abstract: A multi-image detector assembly has an array of detector elements formed upon a single focal plane and a plurality of focusing members, each focusing member focusing a substantially identical scene upon a corresponding one of a plurality of sections of the array. An optical element such as a spectral or polarizing filter is disposed within a plurality of the optical paths of the focusing members, preferably proximate the focal plane. Image detection occurs continuously and simultaneously so as to provide a spatially and temporally correlated set of separate images utilizing the single focal plane.

Abstract: The feedback in a laser system is measured in near real time by inducing a frequency shift and the feedback being based on the phase shift undergone by the feedback beam in an external cavity. The frequency shift is induced by phase modulating the feedback beam, for example by varying the position of an optical element placed in the feedback beam upon applying a ramp signal to the optical element. Frequency is detected by a Fabry-Perot interferometer which generates an interference fringe pattern, the intensity of the central fringe being detected to determine the induced frequency shift in real time, the amount of feedback being proportional to the time of flight multiplied by the frequency shift.

Abstract: A Fourier-transform spectrometer includes a plurality of detectors (118-1 through 118-L), each of which receives light from a pair of optical paths of different optical path lengths. A movable mirror (116) varies the difference between the path lengths of each pair. Analog-to-digital converters (124-1 through 124-L) sample the resultant outputs at regular distance-difference intervals so as to generate sequences of sample values. The distance-difference ranges for the pairs of paths associated with different detectors are different, and the sequences together make up a synthetic interferogram that covers a range of distance differences 2L times the range of motion of the movable mirror (116). A Fourier transformation circuit (126) computes the Fourier transform of the synthetic interferogram, thereby determining the power spectrum of the incoming light, and operates a display (128) to indicate the result.

Abstract: A device for detecting slag in molten metal comprises a ladle shroud with a hollow passage that communicates a ladle containing the molten metal to a tundish to allow the molten metal to flow from the ladle to the tundish, and an electrically conductive element positioned in a wall of the hollow passage, so that the element is in electrical contact with the molten metal. If the ladle shroud is electrically conductive, the electrically conductive element is electrically isolated therefrom by an insulating sleeve around the electrically conductive element. Preferably, the electrically conductive element is a steel pin, particularly one where the steel pin has an flanged end in electrical contact with said molten metal, and more particularly where opposite end has a bore therein to accommodate an electrical lead wire to communicate the pin to a voltmeter.

Abstract: Alignment of antenna radiating elements is monitored by diode lasers which have polarized light reflected from the body of the antenna toward a detector array. The array monitors displacement of polarized radiations from a diode laser corresponding to displacements of the antenna body. Signals from the array to electronically compensate for misalignment or may be utilized in a servo system for mechanically correcting misalignment.