Patents by Inventor Robert E. Wayne

Robert E. Wayne has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Workpiece gripping integrity sensor
    Patent number: 8226142
    Abstract: A workpiece gripping integrity device and method are provided having a charge-transfer sensing device configured to detect a change in charge associated with a gripper arm assembly based on a grip condition thereof. The charge-transfer sensing device can be configured to detect a change in capacitance between the gripper arm assembly and ground, wherein the change in capacitance is based on a grip condition of the gripper arm assembly associated with a plurality of grippers contacting the workpiece.
    Type: Grant
    Filed: July 23, 2008
    Date of Patent: July 24, 2012
    Assignee: Axcelis Technologies, Inc.
    Inventors: Joseph D. Gillespie, Sor Kham, Robert E. Wayne
  • WORKPIECE GRIPPING INTEGRITY SENSOR
    Publication number: 20090039664
    Abstract: The present invention involves a workpiece gripping integrity device or method comprising a charge-transfer sensing device, configured to detect a change in charge associated with the gripper arm assembly based on a grip condition thereof.
    Type: Application
    Filed: July 23, 2008
    Publication date: February 12, 2009
    Applicant: Axcelis Technologies, Inc.
    Inventors: Joseph D. Gillespie, Sor Kham, Robert E. Wayne