Abstract: The invention relates to a flexible and cost-effective method for fabricating customized rerouting metallization of the circuit contact pads. Localized depositions of insulating as well as conducting paths are provided with the capability for manufacturing multi-layered networks of interconnection. In a gas-filled chamber, either a focused laser, or an unfocussed lased impinging through a mask, is used to locally heat selected areas of the chip surface. The gas decomposes on the heated areas, depositing insulating or conducting material precisely on the heated surface areas, respectively. With this additional flexibility for product design and assembly, a number of interesting new products can now be fabricated which are in demand in both commercial and military markets.

Abstract: A method of fabricating bond pads on a semiconductor device which includes providing a semiconductor device having a surface. A coating of solderable electrically conductive metal is deposited on the surface, preferably by sputtering, and portions of the coating are selectively removed by ablation or vaporization, preferably by use of a laser beam. The selective removal is accomplished by selective movement of the laser relative to the coating or by use of a mask followed by traversal of the laser beam over the entire coating. The coating is preferably a 500 angstrom layer of chromium over which is a 1500 angstrom layer of palladium followed by a 3500 angstrom layer of gold.