Patents by Inventor Robert Eberwein

Robert Eberwein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion Source for Metal Implantation and Methods Thereof
    Publication number: 20160322198
    Abstract: An ion source for an implanter includes a first solid state source electrode disposed in an ion source chamber. The first solid state source electrode includes a source material coupled to a first negative potential node. A second solid state source electrode is disposed in the ion source chamber. The second solid state source electrode includes the source material coupled to a second negative potential node, and the first solid state source electrode and the second solid state source electrode are configured to produce ions to be implanted by the implanter.
    Type: Application
    Filed: April 30, 2015
    Publication date: November 3, 2016
    Inventors: Ewald Wiltsche, Peter Zupan, Werner Schustereder, Moriz Jelinek, Robert Eberwein, Friedrich Kroener