Patents by Inventor Robert Edwin Jones

Robert Edwin Jones has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a semiconductor device using an etch stop layer
    Patent number: 6235603
    Abstract: A first etch stop layer (14) is formed over a semiconductor substrate (10). A first dielectric layer (20) is formed over the first etch stop layer (14). An opening (22) is formed in the first dielectric layer (20). The opening (22) extends through the first dielectric layer (20) and exposes a first conductive material (18) under the first dielectric layer (20). A second conductive material (30) is deposited over the semiconductor substrate (10) and within the opening (22). The second conductive material (30) electrically contacts the first conductive material (18). Portions of the second conductive material (30) lying outside of the opening (22) are removed and then portions of the first dielectric layer (20) are removed to expose portions of the first etch stop layer (14).
    Type: Grant
    Filed: July 12, 1999
    Date of Patent: May 22, 2001
    Assignee: Motorola Inc.
    Inventors: Bradley M. Melnick, Hideo Oi, Bruce E. White, Jr., Robert Edwin Jones