Abstract: A vehicle fleet management information system for identification of location and direction of movement of each vehicle in the fleet in real-time and automatic communication directly with management offices to report its location and heading, and status of predetermined events in which the vehicle may be engaged. One example is a cement delivery truck which monitors location, speed and status information such as start pour, pouring, end pour, wash and leave job, and automatically transmits this information with a management office without requiring affirmative action by the vehicle operator.

Abstract: A vehicle fleet management information system for identification of location and direction of movement of each vehicle in the fleet in real-time and automatic communication directly with management offices to report its location and heading, and status of predetermined events in which the vehicle may be engaged. Each fleet vehicle is assigned a unique time slot to transmit its reporting information over a communications network without substantially interfering with transmissions from other vehicles in their own respective time slots. Precise time synchronization is provided by a timing control PLL which provides timing corrections as necessary from GPS based time reference. The network includes a dual band full-duplex interface with TDMA on one-half of the interface and broadcast on the other half. Additionally, time processing units of microprocessors in components throughout the network perform precise clock synchronization.

Abstract: A vehicle fleet management information system identifies location and direction of movement of each vehicle in a fleet in real-time, and automatically reports such information, as well as status of predetermined events in which the vehicle is engaged, directly to the fleet manager. Each fleet vehicle has an assigned time slot to transmit its reporting information over a communications network without interfering with transmissions from other vehicles in their own respective time slots. A timing control phase lock loop (PLL) provides precise time synchronization for timing corrections from a global positioning system (GPS) based time reference. A dual band full-duplex interface of the network has TDMA on one-half and broadcast on the other half. Microprocessor time processing units in components of the network perform precise clock synchronization. Space diversity performed on received vehicle transmitted messages avoids data corruption.

Abstract: A machine for polishing semiconductor wafers including a rotatable index table and a drive mechanism for the index table. The index table temporarily accommodates wafers between processing steps. The drive mechanism includes a continuously circulating grooved timing belt that engages gear teeth formed on an outside diameter portion of the index table to effect rotation of the index table. The index table includes a large diameter central opening for accommodating passage of other system components.

Abstract: A distributed control system for a semiconductor wafer processing machine includes a master control module and a plurality of application control modules. Each of the application control modules and the master control module are capable of autonomous, independent operation. The master control module regulates the operation of the application control modules, and the application control modules govern a number of sub-procedures carried out by the wafer processing machine. The sub-procedures may be governed by respective processing recipes that are downloaded from the master control module to the application control modules via a network link architecture.

Abstract: The present invention provides methods and apparatus which permit the in-process, in-situ, substantially real time measurement of the actual thickness of a surface layer of a work piece, for example, a semiconductor wafer or the like. The present invention generally comprises a probe disposed proximate to the outer perimeter of a polishing pad on a CMP table, such that the probe establishes optical contact with the wafer surface as a portion of the wafer extends beyond the outer perimeter of the polishing pad. The present invention may further comprise a nozzle which applies a stream of compressed air at the disk surface under inspection, to remove excess slurry from the local region of the workpiece being inspected. A broad band light source, namely a tungsten halogen light, is employed in conjunction with a fiber optic cable to direct light at the wafer surface.

Abstract: A tilt mechanism for periodically tilting a cassette configured to hold a plurality of wafers or workpieces such that the wafers or workpieces become gravity-loaded against a rear portion of the cassette. The tilt mechanism is mounted entirely above a worktable of a CMP or other processing machine and comprises a housing which houses a circular cam having a spiral groove formed therein. A tilt arm is pivotally mounted to the housing and extends vertically between a lower end which is adjacent the cam and an upper end which is fixed to a platform supporting a cassette holding a plurality of workpieces. A cam follower is attached to the lower end of the arm and projects into the groove. Rotary motion of the cam effects pivotal movement of the tilt arm which, in turn, effects tilting of the support platform and the cassette.

Abstract: A tilt mechanism for periodically tilting a cassette configured to hold a plurality of wafers or workpieces such that the wafers or workpieces become gravity-loaded against a rear portion of the cassette. The tilt mechanism is mounted entirely above a worktable of a CMP or other processing machine and comprises a housing which houses a circular cam having a spiral groove formed therein. A tilt arm is pivotally mounted to the housing and extends vertically between a lower end which is adjacent the cam and an upper end which is fixed to a platform supporting a cassette holding a plurality of workpieces. A cam follower is attached to the lower end of the arm and projects into the groove. Rotary motion of the cam effects pivotal movement of the tilt arm which, in turn, effects tilting of the support platform and the cassette.

Abstract: A method for detecting the presence of a workpiece on a polishing pad of a chemical mechanical polishing (CMP) machine applies an optical interrogation signal to a workpiece during the CMP process. An optical probe assembly produces a light signal that communicates with the polishing pad; portions of the light signal reflect from the polishing pad in a scattered manner. A light receptor receives reflected light associated with the interrogation signal, and the characteristics of the received light are analyzed and processed by a suitable processor. By analyzing the scattered light signals, the method distinguishes the reflective characteristics of the polishing pad from the reflective characteristics of the workpiece. Thus, the method may be used to detect a lost or broken workpiece in a fast and effective manner.

Abstract: A machine for polishing semiconductor wafers including a rotatable index table and a drive mechanism for the index table. The index table temporarily accommodates wafers between processing steps. The drive mechanism includes a continuously circulating grooved timing belt that engages gear teeth formed on an outside diameter portion of the index table to effect rotation of the index table. The index table includes a large diameter central opening for accommodating passage of other system components.

Abstract: A method for use with a chemical mechanical planarization (CMP) system includes an infrared LED emitter that generates an interrogation signal and directs the interrogation signal toward a polishing pad configured to process a workpiece during the CMP procedure. A reflected signal produced in response to the interrogation signal is received by a detector, and the reflected signal is processed by a converter to produce a control signal having an analog voltage. The control signal is processed and an output is produced indicative of the presence of extraneous material proximate an area of the polishing pad when the analog voltage is measured within a predetermined range. The predetermined voltage range is established such that a variety of polishing pads having different physical characteristics may be employed without altering the position of the emitter or the operating parameters of the apparatus.

Abstract: An apparatus for use with a chemical mechanical planarization (CMP) system includes an infrared LED emitter that generates an interrogation signal and directs the interrogation signal toward a polishing pad configured to process a workpiece during the CMP procedure. A reflected signal produced in response to the interrogation signal is received by a detector, and the reflected signal is processed by a converter to produce a control signal having an analog voltage. The control signal is processed and an output is produced indicative of the presence of extraneous material proximate an area of the polishing pad when the analog voltage is measured within a predetermined range. The predetermined voltage range is established such that a variety of polishing pads having different physical characteristics may be employed without altering the position of the emitter or the operating parameters of the apparatus.

Abstract: An apparatus for detecting the presence of a workpiece on a polishing pad of a chemical mechanical polishing (CMP) machine employs an optical interrogation signal that is applied during the CMP process. An optical probe assembly produces a light signal that communicates with the polishing pad; portions of the light signal reflect from the polishing pad in a scattered manner. A light receptor receives reflected light associated with the interrogation signal, and the characteristics of the received light are analyzed and processed by a processor used by the apparatus. By analyzing the scattered light signals, the apparatus distinguishes the reflective characteristics of the polishing pad from the reflective characteristics of the workpiece. Thus, the apparatus is capable of detecting a lost or broken workpiece in a fast and effective manner.

Abstract: A substantially rectangular metal blank is formed about a mandrel (76) to provide a very open shell (28) having a pair of axially extending lips (20c,20t) separated by a distance sufficient to permit a prewound spool (10) or other product to be inserted radially, laterally into the shell prior to closing the shell about the spool or other product.

Abstract: An apparatus and method are disclosed for forming a very open shell (28) having axially extending lips (20c,20t) spaced sufficiently far apart to permit a prewound spool of web material (10) to be inserted radially, laterally into the very open form shell, after which the shell is closed and end caps (24) are installed. Apparatus are disclosed for forming the very open form shell (40), transferring the shell to a mechanism for applying end caps (48), inserting a prewound spool of web material (56) into the very open shell, positioning the spool accurately within the shell (780-856), closing the shell about the spool (58) and staking the end caps in place (60).

Abstract: A mechanically driven brailer for fish from the bunt of a net includes a handle, a brailer hoop, and brail net attached to the hoop. The brailer hoop is hinged to the handle such that it maintains a coplanar relationship with the handle as both are driven downward into the fish. Release of a latch means allows the hoop to change positions relative to the handle so that the volume of the bunt swept by the hoop is maximized.

Abstract: An enclosed conduit such as a tube, and a method for processing webs with a liquid solution, wherein the web is positioned helically around the periphery of the tube. The tube has openings, such as being porous, at least in the helical path of the web. A liquid solution cushion or bearing is formed between the web and periphery of the tube in at least the helical path of the web by continuously directing the liquid solution outwardly through the openings. In one embodiment, the web is transported by drive rollers or belts against which the web is forced, and edge deflected between the convolutions of a helical rail or band wrapped around the periphery of the tube. In another embodiment, the tube is provided with axially spaced, radially extending protuberances on its periphery for edge deflecting the web along a helical path.

Abstract: A transport apparatus comprising a transport strip wrapped helically around a stationary porous conduit closed off at one end. Liquid under pressure is forced into the open end of the conduit and through the openings in the periphery of the porous conduit, producing a liquid layer between the outer conduit surface and transport strip. A web to be transported, of random length and width, is inserted between the transport strip and the outer surface of the porous conduit and becomes adjoined to the transport strip under the influence of liquid pressure and liquid cohesion. Thus, advancing the transport strip also advances the web, both being supported by the liquid layer which acts as a liquid bearing. Further, if the web is a photographic film or other processable material and the liquid is a suitable processing solution, the liquid layer also serves as a processing medium.

Abstract: An enclosed conduit such as a tube, and a method for processing webs with a liquid solution, wherein the web is positioned helically around the periphery of the tube. The tube has openings, such as being porous, at least in the helical path of the web. A liquid solution cushion or bearing is formed between the web and periphery of the tube in at least the helical path of the web by continuously directing the liquid solution outwardly through the openings. In one embodiment, the web is transported by drive rollers or belts against which the web is forced, and edge deflected between the convolutions of a helical rail or band wrapped around the periphery of the tube. In another embodiment, the tube is provided with axially spaced, radially extending protuberances on its periphery for edge deflecting the web along a helical path.