Patents by Inventor Robert F. McLoughlin
Robert F. McLoughlin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9262361Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.Type: GrantFiled: March 20, 2015Date of Patent: February 16, 2016Assignee: Entegris, Inc.Inventors: James Cedrone, Robert F. McLoughlin, George Gonnella
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Publication number: 20150193370Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.Type: ApplicationFiled: March 20, 2015Publication date: July 9, 2015Inventors: James Cedrone, Robert F. McLoughlin, George Gonnella
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Patent number: 9025454Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.Type: GrantFiled: April 6, 2011Date of Patent: May 5, 2015Assignee: Entegris, Inc.Inventors: James Cedrone, Robert F. McLoughlin, George Gonnella
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Patent number: 8939428Abstract: Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.Type: GrantFiled: March 29, 2013Date of Patent: January 27, 2015Assignee: Entegris, Inc.Inventors: Marc Laverdiere, Robert F. McLoughlin, George Gonnella, Iraj Gashgaee, Jennifer Marrs
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Patent number: 8430120Abstract: A proportional fluid control valve with improved linearity and reduced hysteresis is disclosed. The valve allows for smooth, gentle flow of fluid in a substantially linear fashion, with minimal turns. Preferably the valve is pneumatically actuated. Where temperature is not an issue, the valve can be actuated by any suitable means, including stepper motors, linear motors, voice coils or other force actuators. A versatile molded valve body that requires fewer parts compared to a machined valve is disclosed. In one embodiment, the molded valve body is designed specifically for flow control and contains two sensor housings with carefully positioned flow paths to optimize the use of space. The sensor housing or housings can be separately formed as inserts, allowing installation in various orientations.Type: GrantFiled: November 21, 2011Date of Patent: April 30, 2013Assignee: Entegris, Inc.Inventors: Marc Laverdiere, Robert F. McLoughlin, George Gonnella, Iraj Gashgaee, Jennifer Marrs
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Patent number: 8172546Abstract: Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.Type: GrantFiled: November 20, 2006Date of Patent: May 8, 2012Assignee: Entegris, Inc.Inventors: James Cedrone, George Gonnella, Raymond A. Zagars, Robert F. McLoughlin
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Publication number: 20120091165Abstract: Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.Type: ApplicationFiled: December 9, 2011Publication date: April 19, 2012Applicant: Entegris, Inc.Inventors: James Cedrone, George Gonnella, Raymond A. Zagars, Robert F. McLoughlin
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Publication number: 20120090704Abstract: Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.Type: ApplicationFiled: November 21, 2011Publication date: April 19, 2012Applicant: ENTEGRIS, INC.Inventors: Marc Laverdiere, Robert F. McLoughlin, George Gonnella, Iraj Gashgaee, Jennifer Marrs
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Patent number: 8082946Abstract: Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having a frictional flow element fluid inlet in fluid communication with the fluid outlet of the proportional flow valve and having a frictional flow element fluid outlet spaced from the frictional flow element fluid inlet, an upstream pressure sensor; a downstream pressure sensor; and a controller in communication with the upstream pressure sensor, the downstream pressure sensor and the pneumatic proportional control valve.Type: GrantFiled: May 20, 2009Date of Patent: December 27, 2011Assignee: Entegris, Inc.Inventors: Marc Laverdiere, Robert F. McLoughlin, George Gonnella, Iraj Gashgaee, Jennifer Marrs
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Patent number: 8082066Abstract: Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.Type: GrantFiled: November 9, 2007Date of Patent: December 20, 2011Assignee: Entegris, Inc.Inventors: Marc Laverdiere, Robert F McLoughlin
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Patent number: 8015995Abstract: One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.Type: GrantFiled: May 10, 2010Date of Patent: September 13, 2011Assignee: Entegris, Inc.Inventors: Craig L. Brodeur, Marc Laverdiere, Robert F. McLoughlin, J. Karl Niermeyer, Jieh-Hwa Shyu
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Publication number: 20110213504Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.Type: ApplicationFiled: May 10, 2011Publication date: September 1, 2011Inventors: James Cedrone, Robert F. McLoughlin, George Gonnella
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Publication number: 20110208890Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.Type: ApplicationFiled: April 6, 2011Publication date: August 25, 2011Inventors: James Cedrone, Robert F. McLoughlin, George Gonnella
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Publication number: 20110194373Abstract: Embodiments of the invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.Type: ApplicationFiled: April 22, 2011Publication date: August 11, 2011Inventors: J. Karl Niermeyer, Robert F. McLoughlin, Joseph E. Smith
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Patent number: 7965208Abstract: Disclosed herein are embodiments of an auto ranging system and method for an analog signal. A microprocessor is configured to digitally control the programmable gains of an operational amplifier based on the digital output of an A/D converter which may reside on or packaged along with the microprocessor. The amplifier receives a raw analog signal from a sensor and provides an amplified analog signal to the A/D converter. The gain of the amplifier generally corresponds to some range of the sensor signal. The A/D converter outputs a number of bits representative of the input signal. A microprocessor which is configured to digitally control the programmable gains of the amplifier receives and examines the output from the A/D converter and automatically adjusts the gain of the amplifier accordingly and as needed to keep or maintain the output from the A/D converter in a predetermined range.Type: GrantFiled: August 10, 2007Date of Patent: June 21, 2011Assignee: Entegris, Inc.Inventor: Robert F. McLoughlin
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Patent number: 7946751Abstract: Embodiments of the present invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.Type: GrantFiled: January 8, 2009Date of Patent: May 24, 2011Assignee: Entegris, Inc.Inventors: J. Karl Niermeyer, Robert F. McLoughlin, Joseph E. Smith
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Patent number: 7940664Abstract: Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.Type: GrantFiled: November 20, 2006Date of Patent: May 10, 2011Assignee: Entegris, Inc.Inventors: James Cedrone, Robert F. McLoughlin, George Gonnella
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Publication number: 20100236643Abstract: One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.Type: ApplicationFiled: May 10, 2010Publication date: September 23, 2010Inventors: Craig L. Brodeur, Marc Laverdiere, Robert F. McLoughlin, J. Karl Niermeyer, Jieh-Hwa Shyu
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Patent number: 7740024Abstract: One embodiment of the present invention can include a flow control device a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.Type: GrantFiled: February 9, 2005Date of Patent: June 22, 2010Assignee: Entegris, Inc.Inventors: Craig L. Brodeur, Marc Laverdiere, Robert F. McLoughlin, J. Karl Niermeyer, Jieh-Hwa Shyu
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Patent number: 7726876Abstract: Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.Type: GrantFiled: March 14, 2008Date of Patent: June 1, 2010Assignee: Entegris, Inc.Inventors: Marc Laverdiere, Robert F. McLoughlin, Michael Clarke, Dale Maenke, Wiley James Wilkinson