Patents by Inventor Robert G. Poulsen

Robert G. Poulsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • End point control in plasma etching
    Patent number: 4528438
    Abstract: The end point in plasma etching is detected by monitoring the optical emission from the plasma, selecting a particular optical emission line and detecting a substantial variation in the intensity of the emission. This indicates a change in material being etched and thus the completion of etching of one material, or the beginning of etching of another material. It is also applicable to removing, or etching, photoresist material.
    Type: Grant
    Filed: January 7, 1983
    Date of Patent: July 9, 1985
    Assignee: Northern Telecom Limited
    Inventors: Robert G. Poulsen, Gerald M. Smith, William D. Westwood