Patents by Inventor Robert Gayazov

Robert Gayazov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
    Publication number: 20070069159
    Abstract: A device for generating radiation source based on a discharge includes a cathode and an anode. A discharge is created in a material comprising an alloy of two or more substances.
    Type: Application
    Filed: September 22, 2006
    Publication date: March 29, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Vadim Banine, Vladimir Ivanov, Konstantin Koshelev, Robert Gayazov, Vladimir Krivtsun
  • Lithographic apparatus, radiation system and device manufacturing method
    Publication number: 20070001126
    Abstract: A foil trap is located in a path of a radiation beam. The foil trap includes an array of conductive strips. A voltage application circuit is coupled to the strips to apply voltage differences between pairs of adjacent ones of the strips. The voltage application circuit includes a current limiting circuit arranged to limit currents to the strips to values below a threshold value above which self-sustained arc discharge may arise in the foil trap.
    Type: Application
    Filed: June 30, 2005
    Publication date: January 4, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Robert Gayazov, Vadim Banine, Vladimir Ivanov, Evgenii Korob, Konstantin Koshelev, Givi Zukavishvili, Yurii Sidelnikov
  • Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
    Publication number: 20060071180
    Abstract: A device for generating radiation or a source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode of cathode or on a separate material located in between the anode and cathode.
    Type: Application
    Filed: July 12, 2005
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Konstantin Koshelev, Vladimir Ivanov, Evgenii Korob, Givi Zukavishvili, Robert Gayazov, Vladimir Krivtsun
  • Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
    Publication number: 20060011864
    Abstract: A device for generating radiation source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode of cathode or on a separate material located in between the anode and cathode.
    Type: Application
    Filed: July 14, 2004
    Publication date: January 19, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Konstantin Koshelev, Vladimir Ivanov, Evgenii Korob, Givi Zukavishvili, Robert Gayazov, Vladimir Krivtsun