Abstract: The invention involves a method of characterizing a plasma reactor chamber through the behavior of many selected plasma parameters as functions of many selected chamber parameters. The plasma parameters may be selected from a group including ion density, wafer voltage, etch rate and wafer current or other plasma parameters. The chamber parameters are selected from a group including source power, bias power, chamber pressure, magnetic coil current in different magnetic coils, gas flow rates in different gas injection zones and species composition of the gas in different gas injection zones.

Abstract: A plasma etch process includes injecting process gases with different compositions of chemical species through different radial gas injection zones of an overhead electrode to establish a desired distribution of chemical species among the plural gas injection zones.

Abstract: A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing.

Abstract: A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing.

Abstract: A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing.

Abstract: A system and method for synchronizing and selectively addressing multiple receivers in a wireless communication system includes a spread spectrum transmitter and one or more spread spectrum receivers. The transmitter transmits a signal having an observable parameter which is pseudo-randomly varied. The receiver measures the relative times between recurrences of a selected value of the observable parameter being pseudo-randomly varied, and determines an initial state of the transmitter based upon the measured relative times. The receiver then synchronizes itself to the estimated current state of the transmitter using the determined initial state as a starting reference. In a frequency hopping embodiment, the spread spectrum transmitter comprises a feedback shift register, and transmits a sequence of pseudo-randomly hopped frequencies determined by the shift register.

Abstract: A system and method for synchronizing and selectively addressing multiple receivers in a wireless communication system includes a spread spectrum transmitter and one or more spread spectrum receivers. The transmitter transmits a signal having an observable parameter which is pseudo-randomly varied. The receiver measures the relative times between recurrences of a selected value of the observable parameter being pseudo-randomly varied, and determines an initial state of the transmitter based upon the measured relative times. The receiver then synchronizes itself to the estimated current state of the transmitter using the determined initial state as a starting reference. In a frequency hopping embodiment, the spread spectrum transmitter comprises a feedback shift register, and transmits a sequence of pseudo-randomly hopped frequencies determined by the shift register.

Abstract: An identification system for identifying a container has distinct and visibly different printed identifying indicia each for identifying the container and disposed on a surface portion of the container. An opaque covering material covers the printed identifying indicia. The opaque covering material is removable to selectively expose a preselected one of the printed identifying indicia for identifying the container by visual inspection of the exposed printed identifying indicia.

Abstract: Method of putting a golf ball using a putter having a club head of any legal configuration, and a shaft of sufficient length that its end can be held by the golfer against, or pressed into, the armpit or the area at the front of the shoulder, which area includes the pectoralis minor muscle (collectively “point of contact”) on the target side of the player's body. The actual length of the shaft will be determined by the distance between the point of contact and the ground when the player has assumed a stance of his choosing. The target side arm is substantially fully extended, and the shaft rests against or is directly adjacent to that arm. The target side hand grasps the club with the target side arm at substantially full extension. The other hand can grasp the grip or the shaft, or rest on or grip the target side hand or arm, at any point and in any fashion.

Abstract: An identification system distinguishes among a set of individual containers. The identification system has an identifier member associated with each of the containers in the set for facilitating visual discrimination of each of the containers from the others of the set. The identifier member of each container in the set has distinct and visibly different printed identifying indicia positioned over a surface portion of the container, and an opaque covering material covering the printed identifying indicia. The opaque covering material is removable to selectively expose a preselected one of the printed identifying indicia so that during consumption of the contents of the container a user may readily distinguish his container from the other containers in the set by visual inspection of the exposed printed identifying indicia.

Abstract: An identification system distinguishes among a set of individual containers. The identification system has an identifier member associated with each of the containers in the set for facilitating visual discrimination of each of the containers from the others of the set. The identifier member of each container in the set has distinct and visibly different printed identifying indicia positioned over a surface portion of the container, and an opaque covering material covering the printed identifying indicia. The opaque covering material is removable to selectively expose a preselected one of the printed identifying indicia so that during consumption of the contents of the container a user may readily distinguish his container from the other containers in the set by visual inspection of the exposed printed identifying indicia.

Abstract: In a method for data transmission in which the binary original data (D0, . . . , Dm) is transferred from a transmitter to a unit of a receiver (1), selected preferably by means of a binary base address (A0, . . . , An), preferably to a register (80, . . . , 87), where the original data (D0, . . . , Dm) and preferably also the base address (A0, . . . , An) are transmitted through one or several data lines, the inverted original data (inversion data) (D0′, . . . , Dm′) and preferably also the complementary base address (complementary address) (A0′, . . . , An′, Ak) are transmitted by the transmitter. The transmitted inversion data (D0′, . . . , Dm′) and preferably the transmitted complementary address (A0′, . . . , An′, Ak) are inverted in the receiver, the transmitted base address (A0, . . . , An) and the transmitted original data (D0, . . . , Dm) are compared with the inverted complementary address (A0′, . . .

Abstract: A spread spectrum transmitter for generating a plurality of spread spectrum codes comprises a shift register having a plurality of stages, with a plurality of tap sets connected to selected ones of said stages. Each tap set defines a different spread spectrum code, which may be maximal or non-maximal. Outputs from the tap sets are combined using exclusive-OR gates and fed back to through a table of logic gates to the input of the shift register. A serial data register is loaded from a data stream and clocked periodically into a parallel data register. The parallel data register corresponds to a data symbol and is connected to the table, whereby one of the spread spectrum codes at a time is selected. A code portion of the spread spectrum code up to a designated length is generated for each data symbol. More than one code portion may be simultaneously sent using offset quadrature phase shift keying.

Abstract: A system for despreading and/or demodulating spread spectrum codes is provided. A data signal is encoded using an M-ary transmission technique, wherein predefined symbol codes are associated with a particular series of data bits. A receiver comprises a plurality of delay elements or a shift register with a plurality of taps configured to recognize one or more the predetermined symbol codes. Delayed representations of the received signal are generated and combined to produce a known output sequence, such as a string of consecutive one or consecutive zeroes, when a recognizable spread spectrum code is received. The receiver shift register may be preloaded such that recognition may occur starting with the first received chip. More than one set of taps may be coupled to the same shift register, so that more than one of the M spreading codes may be recognized by the same shift register.

Abstract: A method for communicating using a plurality of spread spectrum codes. A plurality of spreading codes are generated by use of one or more linear feedback shift registers configured with feedback taps. The spreading codes may be maximal or non-maximal. A plurality of code portions are selected, one from each of the spreading codes. The code portions each have the same length and are selected for low cross-correlation and favorable auto-correlation and spectral properties. Each of the code portions is associated with a data symbol representing a unique group of data bits. An input data stream is divided into groups of data bits and, in response thereto, the code portion associated with each group of data bits is transmitted. At the receiver, the transmitted signal is captured in one or more receive shift registers.