Patents by Inventor Robert Groulx

Robert Groulx has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming an optical sensor device having a composite sandwich structure of alternating titanium and titanium nitride layers
    Patent number: 6833282
    Abstract: In order to make a charge couple device including an interconnect layer to contact active areas, a first layer of a first titanium nitride layer on the active areas, and then a series of alternating titanium and titanium nitride layers are deposited to form a composite sandwich structure. This structure is less prone flaking while able to withstand high temperature treatment during fabrication of backside illuminated sensors to improve quantum efficiency and reduce dark current.
    Type: Grant
    Filed: May 12, 2003
    Date of Patent: December 21, 2004
    Assignee: DALSA Semiconductor Inc.
    Inventors: Robert Groulx, Raymond Frost, Yves Tremblay
  • CCD wafers with titanium refractory metal
    Publication number: 20030197209
    Abstract: In order to make a charge couple device including an interconnect layer to contact active areas, a first layer of a first titanium nitride layer on the active areas, and then a series of alternating titanium and titanium nitride layers are deposited to form a composite sandwich structure. This structure is less prone flaking while able to withstand high temperature treatment during fabrication of backside illuminated sensors to improve quantum efficiency and reduce dark current.
    Type: Application
    Filed: May 12, 2003
    Publication date: October 23, 2003
    Inventors: Robert Groulx, Raymond Frost, Yves Tremblay