Abstract: A silicon capacitive microsensor which is sensitive to acceleration forces includes a silicon capacitive sensing element 10 comprising three silicon layers 12,16,26 having glass dielectric layers 14,24 between each pair of silicon layers with the middle silicon layer 16 consisting of a proof mass 18 suspended between the two glass dielectric layers 14,24 by a silicon hinge 20 which is connected to a slightly thicker silicon support layer 17 around the periphery (FIG. 3 ) between the glass layers 14,24 (FIG. 1 ). Three metallic bond pads 40,42,44 on the surface 45 of the silicon layers 26,16,12, respectively, are soldered to circuit trace pads 108 on a circuit board 100 which has a glass upper layer 104 and a silicon support layer 102. The thermal expansion coefficient between the glass layer 104 and the sensing element 10 are substantially the same, thereby minimizing thermally induced stresses on the sensing element 10 and minimizing inaccuracies associated therewith.

Abstract: A silicon capacitive pressure sensor is disclosed that has a glass dielectric material sputter-deposited onto a silicon substrate of the sensor. After deposition of the bulk dielectric material, the glass is patterned and etched to form a pair of concentric rings. An inner ring is of a circular shape, while the outer ring is of an octagonal shape. As compared to prior art dielectric spacers which are of a single ring of relatively wide thickness, the pair of concentric rings disclosed herein significantly reduce the parasitic capacitance of the glass dielectric material, thereby increasing the sensitivity of the sensor.

Abstract: A dual-element, parallel-plate silicon capacitative pressure sensor includes a pressure sensing element and a reference element of identical structure. Both elements are separately fabricated from the same silicon wafers using identical processing steps. Further, both elements are simultaneously mounted to a header using identical mounting steps. Such identical fabrication and mounting steps serve to identically match the dielectric materials and, thus, the aging properties of both the sensing and reference elements. By matching the sensing and reference elements in these ways, and by aging these components at elevated temperatures in exactly the same way, it is possible to achieve an extremely close match in long-term dielectric aging properties.

Abstract: A dual-element, parallel-plate silicon capacitative pressure sensor includes a pressure sensing element and a reference element of identical structure. Both elements are fabricated from the same silicon wafers using identical processing steps. Further, both elements are simultaneously mounted to a header using identical mounting steps. Such identical fabrication and mounting steps serve to identically match the dielectric materials and, thus, the aging properties of both the sensing and reference elements. By matching the sensing and reference elements in these ways, and by aging these components at elevated temperatures in exactly the same way, it is possible to achieve an extremely close match in long-term dielectric aging properties.

Abstract: A silicon capacitive pressure sensor is disclosed having a silicon substrate and a silicon diaphragm separated by a glass dielectric spacer. The substrate has an upper surface formed as a mesa which is generally curved in shape, the curvature being concave. Due to manufacturing constraints the mesa upper surface comprises a series of concentric rings that approximate the desired concave shape. The step height and diameter of the rings are such that, at full deflection of the diaphragm, the diaphragm touches the center of the mesa, but not the edges of the individual steps. That is, letting the edges or corners of the steps define a curve, the radius of curvature of the diaphragm is smaller than the radius of curvature of the locus of the step corners.

Abstract: Manufacturing hinged diaphragms for semiconductor sensors (e.g., accelerometers, pressure transducers, etc.), from a SIMOX wafer (W, FIG. 3 A), in which the internal, insulating, silicon dioxide (SiO.sub.2) layer (3) is used as an etch stop in removing silicon from the underside of the wafer by etching with an appropriately selective etch, producing the reduced thickness, peripheral "hinge" areas (9; FIG. 3 A to FIG. 3 B), with the exposed part of the silicon dioxide layer being removed in a subsequent etching step (FIG. 3 B to FIG. 3C) using a different, selective etch. This produces a single layer, single-crystal, silicon "hinge" (9'; FIG. 3C) of uniform, continuous material, enhancing the linearity of diaphragm movement during use and the sensor's sensitivity and accuracy. (See FIG. 4 for methodological steps.

Abstract: A micromachined three-plate capacitive accelerometer incorporates a "sandwich" proof mass formed from two layers that are boron-doped to define hinges attached essentially to the midplane of the proof mass by being placed abutting a bonding interface region at the midplane.

Abstract: Pressure sensors utilizing capacitance variations to sense pressure variations of the silicon-on-silicon type in which dielectric drift, which occurs in such sensors due to the changing characteristics primarily of the dielectric wall support layer (16) extending up from the silicon substrate (12) between it and the silicon diaphragm (11), is minimized by in turn minimizing the contribution of the dielectric layer to the total capacitance of the sensor (10), reducing the dielectric contribution of the capacitance from, for example, about fifty (50%) percent down to a range of no more than about twenty to twenty-five (20-25%) percent and down typically to sixteen to about ten (16%-10%) percent of the total capacitance or lower. Three exemplary approaches are illustrated, namely, etching the outer edges of the dielectric layer, making the wall(s) it form(s) thinner (FIG.

Abstract: A micromachined three-plate capacitive accelerometer incorporates hinges attached to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration.

Abstract: The present invention is related to a sight glass(10) that utilizes both reflected light at a glass to air interface(40) as well as the light transmitted through a glass to fluid to glass interface(44) to form a light pattern that is indicative of the true fluid level. By requiring that light always appear in either an "air" or "fluid" channel(42,46), any absence of light is assumed due to film coated surfaces or to other abnormal conditions. An absence of light is a signal that maintenance is required.

Abstract: The method and apparatus for generating start of combustion signals associated with the combustion events in a diesel engine (10), and for using such signals to control the timing of fuel delivery to the engine. The combustion event is sensed, as by an electrostatic (230, 330) or optical (130, 430) sensor, and signal conditioning circuitry (32) provides a start-of-combustion (SOC) signal (34) which is directly and precisely indicative of the time of the onset of combustion. The sensors (130, 230) include self-cleaning capabilities (48, 248) for extended operating life on an engine. The sensors may be incorporated in the structure of a glow plug (330, 430). The SOC signal (34) is advantageously supplied to a timing control circuit (26) which delivers a timing control signal (28) to a fuel delivery device, such as the controller (16') associated with a fuel pump (16).

Abstract: A method and apparatus are provided for controlling the torque or fuel quantity limit to an internal combustion engine such as a diesel engine, at least partly as a function of the sensed level of smoke in the exhaust gas stream of the engine. An open-loop preliminary fuel quantity limit signal is provided as a function of engine speed. The actual smoke level is compared with a smoke limit value for the particular operating condition, and an error signal indicates the sense and possibly the magnitude of any difference. The error signal is the basis of a compensating signal which is added to the open-loop preliminary fuel quantity limit signal such that the resulting fuel quantity limit signal provides for maximum torque without exceeding the smoke limit. The smoke level is obtained by a direct measurement of the particulate level or the like in the exhaust gas stream. An alarm may be provided for indicating when the actual smoke level exceeds some threshold relative to the smoke limit.

Abstract: Ions are emitted (14) into the gas stream (15) of a gas turbine engine at a point with respect to the gas stream (15), in comparison with the position of an ion-responsive electrostatic probe (24), so that there is a discernible, reliable difference in the ion impingement on the electrostatic probe (24) during normal gas flow (FIGS. 3 and 4) in contrast with that which occurs during the abnormal gas flow attendant a surge (FIG. 5) thereby to provide early and sustained detection of stall and/or surge conditions in the engine, even in the absence of flame from the combustor (17).

Abstract: A method and apparatus for controlling the recirculation of exhaust gas in a diesel engine includes an EGR valve responsive to an EGR control signal for relatively opening and closing a recirculation duct to the passage of exhaust gas therethrough. A sensor provides a signal indicative of the level of particulates in the exhaust gas stream. Control circuitry responsive to various signals indicative of engine operating conditions, including the signal indicative of exhaust gas particulate level, provides an EGR control signal for regulating the EGR valve at least partly as a function of the sensed level of particulates in the exhaust gas stream. The engine operating condition signals typically are indicative of the speed of the engine or fuel injection pump, the engine load, and engine operating temperature.

Abstract: The method and apparatus for generating start of combustion signals associated with the combustion events in a diesel engine, and for using such signals to control the timing of fuel delivery to the engine. The combustion event is sensed, as by an electrostatic or optical sensor, and signal conditioning circuitry provides a start-of-combustion signal which is directly and precisely indicative of the time of the onset of combustion. The sensors include self-cleaning capabilities for extended operating life on an engine. The sensors may be incorporated in the structure of a glow plug.The SOC signal is advantageously supplied to a timing control circuit which delivers a timing control signal to a fuel delivery device, such as the controller associated with a fuel pump. The control circuit stores one or more start of combustion values which indicate the desired timing, relative to an engine cycle, for the start of the combustion event as a function of speed and load.

Abstract: A method and apparatus are provided for indicating an operating characteristic of a periodically combusting internal combustion engine, such as a diesel engine, having exhaust gas issuing from one or more combustion chambers in a periodic manner through a duct. The particulate in the exhaust gas stream are electrically charged and of the same polarity, and are grouped in packets associated with the periodic combustion in the respective chambers. An electrically conductive, passive electrode, preferably annular in shape, is disposed such that most or all of the exhaust gas flows therethrough so as to electrostatically sense, principally by induced image charge, the passage of the respective packets of charged particles. The electrode is electrically isolated from the duct.

Abstract: An improved electrode configuration and method for the deposition of electrical energy into an electric discharge laser having a gas path transversely disposed to an optical axis and the electric field is disclosed. The electrode configuration includes a cathode, having a row of preionization electrodes with each preionization electrode typically having the configuration of a pin and power electrodes positioned downstream of and in a parallel relationship to the row of preionization electrodes wherein the power electrodes typically have a configuration of a rod, and a planar anode disposed opposite the cathode in a parallel relationship thereto, wherein the cathode and the anode define the gas path therebetween.

Abstract: A flowmeter for the measurement of fluid flow employs a combination of two transit times for the passage of charged particles through a known distance under different conditions. Applications include the measurement of the air-fuel mixture in automobile engines.

Abstract: Various apparatus and their applications to the determination of the flux of a fluid flowing through a region in accordance with the present invention are disclosed. The technique involved is based on the formation of charged particles within the fluid and subjecting these particles to an electric field which is colinear with the direction of fluid travel. Two charged particle collection stations are established, one upstream and the other downstream of the charged particle formation site and the resulting electric currents through such stations are correlated to the flux of the fluid.

Abstract: Apparatus for providing ions having a specific electric charge to a stream of working fluid are disclosed. The ions are produced by a variety of techniques in a volume of the working fluid which is maintained in a protected region within the stream. An electric field draws ions away from the production region and makes them available to the stream of fluid. In many applications an independent electric field is applied to the flowing fluid to move the ions within the working fluid.