Patents by Inventor Robert H. Dykeman

Robert H. Dykeman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contoured quartz anode plate
    Patent number: 4153528
    Abstract: Sputter deposited coating uniformity is improved by contouring the anode plate to provide thinner regions around the wafer edges so that more resputtered coating material is deposited at the wafer edge to compensate for the observed decrease in coating thickness at the edge.
    Type: Grant
    Filed: June 26, 1978
    Date of Patent: May 8, 1979
    Assignee: International Business Machines Corporation
    Inventors: Robert H. Dykeman, Man-Chong Wong