Patents by Inventor Robert H. Heath

Robert H. Heath has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automatic wafer processing system and method
    Patent number: 4352607
    Abstract: An automatic wafer processing system is modular in format and includes wafer treatment units, storage units and air bearing transport track units which are all operatively interconnected in a coplanar configuration to provide an automated wafer flow path. To facilitate such automated system improved variable width air bearing tracks are provided by flexible strips in slots.
    Type: Grant
    Filed: December 11, 1980
    Date of Patent: October 5, 1982
    Assignee: GCA Corporation
    Inventors: W. L. Loveless, Richard J. Trott, Robert H. Heath, William L. Glick
  • Automatic wafer processing system and method
    Patent number: 4278366
    Abstract: An automatic wafer processing system is modular in format and includes wafer treatment units, storage units and air bearing transport track units which are all of a common module size or an integral multiple thereof. All of these units can then be operatively interconnected in a coplanar configuration to provide an automated wafer flow path. Variation of treatment units can provide many different types of wafer processing in a simple and economical manner. To facilitate such automated system improved variable width air bearing tracks are provided along with a buffer storage unit to accommodate differing process times.
    Type: Grant
    Filed: March 18, 1977
    Date of Patent: July 14, 1981
    Assignee: GCA Corporation
    Inventors: W. L. Loveless, Richard J. Trott, Robert H. Heath, William L. Glick