Abstract: An apparatus for optically detecting light-absorbing contamination in at least one particle of low optical-loss material comprises an optical integrating chamber for containing the particles. A laser for emitting a laser beam to illuminate the particles is mounted in the plane of rotation of a rotating mirror such that the laser beam scans in a fan scan. A scanning assembly is mounted in optical alignment with the laser for reflecting the laser beam and for causing the laser beam to scan the particles in the optical integrating chamber. A focusing assembly is mounted in optical alignment with the laser for focusing the scanning laser beam onto the particles in the chamber, the focusing assembly operating in conjunction with the scanning assembly so that light from the laser beam is reflected from the particles and is repeatedly scattered onto the interior walls of the integrating chamber.

Abstract: A scanning laser microscope system for assisting in the detection and characterization of fine details and structures of materials or other samples. The system can have means for enhancing light from the material to assist detection of anomalies, such as inclusions in the material and crystal lattice dislocations. The system can have means for enhancing fluorescent light emitted from the sample. The system can further have very precise means for processing signals representative of light detected from the material.