Patents by Inventor Robert Hainsey
Robert Hainsey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8761216Abstract: The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.Type: GrantFiled: January 11, 2013Date of Patent: June 24, 2014Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Glenn Simenson, Robert Hainsey, David Barsic, Jeffrey Howerton, Wayne Crowther, Patrick Leonard
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Patent number: 8526473Abstract: Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. The temporal pulse profile includes a first portion that defines a first time duration, and a second portion that defines a second time duration. A method includes generating a laser pulse based on laser system input parameters configured to shape the laser pulse according to the temporal pulse profile, detecting the generated laser pulse, comparing the generated laser pulse to the temporal pulse profile, and adjusting the laser system input parameters based on the comparison.Type: GrantFiled: March 31, 2008Date of Patent: September 3, 2013Assignee: Electro Scientific IndustriesInventors: Brian W. Baird, Clint R. Vandergiessen, Steve Swaringen, Robert Hainsey, Yunlong Sun, Kelly J. Bruland, Andrew Hooper
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Patent number: 8379679Abstract: The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.Type: GrantFiled: February 11, 2010Date of Patent: February 19, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Glenn Simenson, Robert Hainsey, David Barsic, Jeffrey Howerton, Wayne Crowther, Patrick Leonard
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Patent number: 8178906Abstract: A laser activated phase change device for use in an integrated circuit comprises a chalcogenide fuse configured to connect a first patterned metal line and a second patterned metal line and positioned between an inter layer dielectric and an over fuse dielectric. The fuse interconnects active semiconductor elements manufactured on a substrate. A method for activating the laser activated phase change device includes selecting a laser condition of a laser based on characteristics of the fuse and programming a phase-change of the fuse with the laser by direct photon absorption until a threshold transition temperature is met.Type: GrantFiled: January 11, 2008Date of Patent: May 15, 2012Assignee: Electro Scientific Industries, Inc.Inventors: Andy E. Hooper, Allen Kawasaki, Robert Hainsey
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Patent number: 8178818Abstract: A laser processing system includes a beam positioning system to align beam delivery coordinates relative to a workpiece. The beam positioning system generates position data corresponding to the alignment. The system also includes a pulsed laser source and a beamlet generation module to receive a laser pulse from the pulsed laser source. The beamlet generation module generates a beamlet array from the laser pulse. The beamlet array includes a plurality of beamlet pulses. The system further includes a beamlet modulator to selectively modulate the amplitude of each beamlet pulse in the beamlet array, and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.Type: GrantFiled: September 22, 2008Date of Patent: May 15, 2012Assignee: Electro Scientific Industries, Inc.Inventors: Brian W. Baird, Kelly J. Bruland, Robert Hainsey
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Publication number: 20110194574Abstract: The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.Type: ApplicationFiled: February 11, 2010Publication date: August 11, 2011Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.Inventors: Haibin Zhang, Glenn Simenson, Robert Hainsey, David Barsic, Jeffrey Howerton, Wayne Crowther, Patrick Leonard
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Publication number: 20090245302Abstract: Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. The temporal pulse profile includes a first portion that defines a first time duration, and a second portion that defines a second time duration. A method includes generating a laser pulse based on laser system input parameters configured to shape the laser pulse according to the temporal pulse profile, detecting the generated laser pulse, comparing the generated laser pulse to the temporal pulse profile, and adjusting the laser system input parameters based on the comparison.Type: ApplicationFiled: March 31, 2008Publication date: October 1, 2009Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.Inventors: Brian W. Baird, Clint R. Vandergiessen, Steve Swaringen, Robert Hainsey, Yunlong Sun, Kelly J. Bruland, Andrew Hooper
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Publication number: 20090242522Abstract: A laser processing system includes a beam positioning system to align beam delivery coordinates relative to a workpiece. The beam positioning system generates position data corresponding to the alignment. The system also includes a pulsed laser source and a beamlet generation module to receive a laser pulse from the pulsed laser source. The beamlet generation module generates a beamlet array from the laser pulse. The beamlet array includes a plurality of beamlet pulses. The system further includes a beamlet modulator to selectively modulate the amplitude of each beamlet pulse in the beamlet array, and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.Type: ApplicationFiled: September 22, 2008Publication date: October 1, 2009Applicant: Electro Scientific Industries, Inc.Inventors: Brian W. Baird, Kelly J. Bruland, Robert Hainsey
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Publication number: 20090179201Abstract: A laser activated phase change device for use in an integrated circuit comprises a chalcogenide fuse configured to connect a first patterned metal line and a second patterned metal line and positioned between an inter layer dielectric and an over fuse dielectric. The fuse interconnects active semiconductor elements manufactured on a substrate. A method for activating the laser activated phase change device includes selecting a laser condition of a laser based on characteristics of the fuse and programming a phase-change of the fuse with the laser by direct photon absorption until a threshold transition temperature is met.Type: ApplicationFiled: January 11, 2008Publication date: July 16, 2009Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.Inventors: Andy E. Hooper, Allen Kawasaki, Robert Hainsey
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Publication number: 20060128073Abstract: A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.Type: ApplicationFiled: February 25, 2005Publication date: June 15, 2006Inventors: Yunlong Sun, Richard Harris, Kelly Bruland, Robert Hainsey, Ho Lo, Lei Sun
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Publication number: 20050087522Abstract: A method and laser system effect rapid removal of material from a workpiece by applying heating energy in the form of a light beam to a target location on the workpiece to elevate its temperature while maintaining its dimensional stability. When the target portion of the workpiece is heated, a laser beam is directed for incidence on the heated target location. The laser beam preferably has a processing laser output that is appropriate to effect removal of the target material from the workpiece. The combined incidence of the processing laser output and the heating energy on the target location enables the processing laser output to remove a portion of the target material at a material removal rate that is higher than the material removal rate achievable when the target material is not heated.Type: ApplicationFiled: February 11, 2004Publication date: April 28, 2005Inventors: Yunlong Sun, Liu Jinjiao, Richard Harris, Pradeep Subrahmanyan, Robert Hainsey, Weixiong Lu
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Publication number: 20050041976Abstract: In a master oscillator power amplifier, a driver (208) of a diode laser (202) is specially controlled to generate a set of two or more injection laser pulses that are injected into a power amplifier (204) operated in an unsaturated state to generate a set (50) of laser pulses (52) that replicate the temporal power profile of the injection laser pulses to remove a conductive link (22) and/or its overlying passivation layer (44) in a memory or other IC chip. Each set (50) includes at least one specially tailored pulse (52) and/or two or more pulses (50) having different temporal power profiles. The duration of the set (50) is short enough to be treated as a single “pulse” by conventional positioning systems (380) to perform on-the-fly link removal without stopping.Type: ApplicationFiled: August 18, 2004Publication date: February 24, 2005Inventors: Yunlong Sun, Robert Hainsey