Abstract: Residues are removed from a surface of a substrate processing component which has a polymer coating below the residues. In one version, the component surfaces are contacted with an organic solvent to remove the residues without damaging or removing the polymer coating. The residues can be process residues or adhesive residues. The cleaning process can be conducted as part of a refurbishment process. In another version, the residues are ablated by scanning a laser across the component surface. In yet another version, the residues are vaporized by scanning a plasma cutter across the surface of the component.

Abstract: Residues are removed from a surface of a substrate processing component which has a polymer coating below the residues. In one version, the component surfaces are contacted with an organic solvent to remove the residues without damaging or removing the polymer coating. The residues can be process residues or adhesive residues. The cleaning process can be conducted as part of a refurbishment process. In another version, the residues are ablated by scanning a laser across the component surface. In yet another version, the residues are vaporized by scanning a plasma cutter across the surface of the component.

Abstract: Residues are removed from a surface of a substrate processing component which has a polymer coating below the residues. In one version, the component surfaces are contacted with an organic solvent to remove the residues without damaging or removing the polymer coating. The residues can be process residues or adhesive residues. The cleaning process can be conducted as part of a refurbishment process. In another version, the residues are ablated by scanning a laser across the component surface. In yet another version, the residues are vaporized by scanning a plasma cutter across the surface of the component.

Abstract: A control system 20 for an automotive vehicle 22, such as an adaptive cruise control (ACC) system, is provided including a controller 24. The controller 24 is electrically coupled to a radar system and a navigation system. The detection system 28 detects an object and generates an object profile. The navigation system 34 generates a navigation signal. The controller 24 in response to the object profile and the navigation signal, generates a predicted future path profile and inhibits resume speed of the vehicle 22 in response to the predicted future path profile. An additional feature of the invention is that the controller 24 may also be electrically coupled to a yaw rate sensor 30. The yaw rate sensor 30 senses the yaw rate of the vehicle 22 and generates a yaw rate signal. The controller 24 in response to the yaw rate signal inhibits resume speed of the vehicle 22.

Abstract: A component of a process chamber is cleaned and refurbished. The component has a structure with an overlying coating having of a first layer. To refurbish the component, the first layer is removed to form an exposed surface on the structure. During or after the removal of the coating, the exposed surface is cleaned with a cleaning fluid, which deposits cleaning residue on the exposed surface. The exposed surface is heated in a substantially non-oxidizing atmosphere to a temperature that is sufficiently high to vaporize the cleaning residue from the surface, thereby forming a cleaned surface. A second layer is formed over the cleaned surface.

Abstract: A method and an apparatus for aligning the elevation of an automotive radar unit.

Abstract: A control system 20 for an automotive vehicle 22, such as an adaptive cruise control (ACC) system, is provided including a controller 24. The controller 24 is electrically coupled to a radar system and a navigation system. The detection system 28 detects an object and generates an object profile. The navigation system 34 generates a navigation signal. The controller 24 in response to the object profile and the navigation signal, generates a predicted future path profile and inhibits resume speed of the vehicle 22 in response to the predicted future path profile. An additional feature of the invention is that the controller 24 may also be electrically coupled to a yaw rate sensor 30. The yaw rate sensor 30 senses the yaw rate of the vehicle 22 and generates a yaw rate signal. The controller 24 in response to the yaw rate signal inhibits resume speed of the vehicle 22.

Abstract: A method and an apparatus for aligning the elevation of an automotive radar unit.