Patents by Inventor Robert Hardister

Robert Hardister has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout
    Patent number: 7925486
    Abstract: Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout are provided. One computer-implemented method for creating a metrology target structure design for a reticle layout includes simulating how one or more initial metrology target structures will be formed on a wafer based on one or more fabrication processes that will be used to form a metrology target structure on the wafer and one or more initial metrology target structure designs. The method also includes creating the metrology target structure design based on results of the simulating step.
    Type: Grant
    Filed: March 13, 2007
    Date of Patent: April 12, 2011
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Mark Smith, Robert Hardister, Mike Pochkowski, Amir Widmann, Elyakim Kassel, Mike Adel
  • COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR CREATING A METROLOGY TARGET STRUCTURE DESIGN FOR A RETICLE LAYOUT
    Publication number: 20070276634
    Abstract: Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout are provided. One computer-implemented method for creating a metrology target structure design for a reticle layout includes simulating how one or more initial metrology target structures will be formed on a wafer based on one or more fabrication processes that will be used to form a metrology target structure on the wafer and one or more initial metrology target structure designs. The method also includes creating the metrology target structure design based on results of the simulating step.
    Type: Application
    Filed: March 13, 2007
    Publication date: November 29, 2007
    Inventors: Mark Smith, Robert Hardister, Mike Pochkowski, Amir Widmann, Elyakim Kassel, Mike Adel