Patents by Inventor Robert Heberlein

Robert Heberlein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SAMPLE DAMAGE AVOIDANCE IN DEVICES AND METHODS FOR SAMPLE PROCESSING AND SAMPLE REPAIR
    Publication number: 20260126720
    Abstract: A method for potential determination pertaining to a sample comprises: positioning a probe above the sample; applying at least a first and a second DC voltage offset each from a first range; applying an AC voltage to the probe for the purpose of inducing a mechanical oscillation of the probe; determining a first induced deflection of the probe for the first DC voltage offset and a second induced deflection of the probe for the second DC voltage offset; and determining a potential outside an interval spanned by the first and second DC voltage offsets at least partly on the basis of the first and second deflections. A method for causing approach by a probe towards a sample comprises: causing approach by the probe towards the sample; repeatedly determining a deflection of the probe during the process of causing approach; and ascertaining an approach termination condition for avoiding sample damage at least partly on the basis of the deflection of the probe or the oscillation frequency thereof.
    Type: Application
    Filed: November 5, 2025
    Publication date: May 7, 2026
    Inventors: Rene Kullock, Hans Hermann Pieper, Christof Baur, Robert Heberlein
  • Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope
    Patent number: 9336983
    Abstract: The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: May 10, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Budach, Christof Baur, Dajana Cujas, Robert Heberlein, Marion Batz
  • SCANNING PARTICLE MICROSCOPE AND METHOD FOR DETERMINING A POSITION CHANGE OF A PARTICLE BEAM OF THE SCANNING PARTICLE MICROSCOPE
    Publication number: 20150380210
    Abstract: The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.
    Type: Application
    Filed: June 30, 2015
    Publication date: December 31, 2015
    Inventors: Michael Budach, Christof Baur, Dajana Cujas, Robert Heberlein