Patents by Inventor Robert IMLAU

Robert IMLAU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Discriminative imaging technique in scanning transmission charged particle microscopy
    Patent number: 10699872
    Abstract: A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps: Providing the specimen on a specimen holder; Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen; Providing a segmented detector for detecting a flux of charged particles traversing the specimen, which flux forms a beam footprint on said detector; Causing said beam to scan across a surface of the specimen, combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield an imaging vector field; Mathematically processing said imaging vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image of the specimen, specifically comprising: Using a confined sub-region of said beam footprint to produce said vector output, and the attendant imaging vector field and
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: June 30, 2020
    Assignee: FEI Company
    Inventors: Eric Gerardus Bosch, Ivan Lazic, Robert Imlau
  • DISCRIMINATIVE IMAGING TECHNIQUE IN SCANNING TRANSMISSION CHARGED PARTICLE MICROSCOPY
    Publication number: 20190272974
    Abstract: A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps: Providing the specimen on a specimen holder; Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen; Providing a segmented detector for detecting a flux of charged particles traversing the specimen, which flux forms a beam footprint on said detector; Causing said beam to scan across a surface of the specimen, combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield an imaging vector field; Mathematically processing said imaging vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image of the specimen, specifically comprising: Using a confined sub-region of said beam footprint to produce said vector output, and the attendant imaging vector field and
    Type: Application
    Filed: February 28, 2019
    Publication date: September 5, 2019
    Inventors: Eric Gerardus BOSCH, Ivan LAZIC, Robert IMLAU