Abstract: Methods and apparatus for processing a substrate are provided herein. For example, an apparatus for processing a substrate comprises a process chamber configured to process a substrate, a substrate support comprising a heat sink configured to cool the substrate support during operation and a water trap panel comprising a pumping ring configured to cool the water trap panel such that the water trap panel condenses water vapor molecules and drops a process chamber pressure during operation, and a chiller operably coupled to the substrate support and configured to supply a cooling fluid to the substrate support via a cooling fluid line that connects to the heat sink and the pumping ring via a serial configuration or a parallel configuration.

Abstract: A planetary gear system for setting a drive ratio of a transmission includes an outer ring gear; a plurality of planetary gears; an inner sun gear; a first rotary input coupled to one of the outer ring gear, the plurality of planetary gears, and the inner sun gear; a second rotary input coupled to another one of the outer ring gear, the plurality of planetary gears, and the inner sun gear; and a rotary output coupled to a remaining one of the outer ring gear, the plurality of planetary gears the inner sun gear. In some cases, the planetary gear system is combined with a second planetary gear system, and the first rotary input of the planetary gear system and the first rotary input of the second planetary gear system are the same, allowing generation of two independent outputs from three inputs.

Abstract: Embodiments of link chamber for use in multi-chamber processing tools or systems are provided herein. In some embodiments, a link chamber for use in a multi-chamber processing tool includes: a link chamber body having a plurality of facets extending between a bottom plate and a top plate, wherein at least seven of the plurality of facets have a chamber opening to form a plurality of chamber openings, wherein the plurality of chamber openings are sized to pass a substrate therethrough, and wherein each of the plurality of chamber openings are configured to be coupled to a slit valve, a load lock chamber, a cover plate, a process chamber, or a second link chamber body.

Abstract: The present invention relates to an automated method of determining a kinetic state of a person. The method obtains accelerometer data from an accelerometer worn on an extremity of the person and processes the accelerometer data to determine a measure for the kinetic state. The present invention further relates to a device for determining a kinetic state of a person. The device comprises a processor configured to process data obtained from an accelerometer worn on an extremity of the person and to determine from the data a measure for the kinetic state. In the method and system the kinetic state is at least one of bradykinesia, dyskinesia, and hyperkinesia.

Abstract: This disclosure is directed to an item-identifying, mobile cart that may be utilized by a user in a materials handling facility to automatically identify a user operating the cart and items that the user places into a basket of the cart. In addition, the cart may update a virtual shopping cart of the identified user to include items taken by the user. The mobile cart may include multiple imaging devices and oriented such that their respective optical axes are directed towards an interior of a perimeter of the top of the basket, and above the top of the basket. The mobile cart may also include an imaging device oriented away from the basket such that a user operating the mobile cart may scan a user identifier using this imaging device to enable recognition of the user.

Abstract: A leak detection system for flat commercial roof structures is disclosed in order to detect and subsequently repair a leak as soon as possible such that any damage to the roof, as well as to other structural and/or insulation components of the overall roof structure, can be minimized due to the absorption or migration of the water. The leak detection system may comprise elongated water detection sensor strips to be fixedly secured to at least two edge portions of insulation board assemblies, or alternatively, electrical circuits may be provided over the entire expanse of the major upper surface portion of each insulation board assembly, or alternatively still further, rolls of water detection sensor strips may be applied to different regions of the flat commercial roof structure.

Abstract: A leak detection system for flat commercial roof structures is disclosed in order to detect and subsequently repair a leak as soon as possible such that any damage to the roof, as well as to other structural and/or insulation components of the overall roof structure, can be minimized due to the absorption or migration of the water. The leak detection system may comprise elongated water detection sensor strips to be fixedly secured to at least two edge portions of insulation board assemblies, or alternatively, electrical circuits may be provided over the entire expanse of the major upper surface portion of each insulation board assembly, or alternatively still further, rolls of water detection sensor strips may be applied to different regions of the flat commercial roof structure.

Abstract: An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.

Abstract: A method of assessing the likelihood that an individual has impulse control disorder. The individual is provided with an actuator, and instructed to actuate the actuator as an acknowledgement of when the individual has completed a reward task. Actuation of the actuator is monitored and recorded. An automated diagnosis of ICD is produced and output, wherein a greater degree of actuation of the actuator by the individual is taken to indicate a greater likelihood that the individual has impulse control disorder.

Abstract: The present invention relates to an automated method of determining a kinetic state of a person. The method obtains accelerometer data from an accelerometer worn on an extremity of the person and processes the accelerometer data to determine a measure for the kinetic state. The present invention further relates to a device for determining a kinetic state of a person. The device comprises a processor configured to process data obtained from an accelerometer worn on an extremity of the person and to determine from the data a measure for the kinetic state. In the method and system the kinetic state is at least one of bradykinesia, dyskinesia, and hyperkinesia.

Abstract: The present invention relates to an automated method of determining a kinetic state of a person. The method obtains accelerometer data from an accelerometer worn on an extremity of the person and processes the accelerometer data to determine a measure for the kinetic state. The present invention further relates to a device for determining a kinetic state of a person. The device comprises a processor configured to process data obtained from an accelerometer worn on an extremity of the person and to determine from the data a measure for the kinetic state. In the method and system the kinetic state is at least one of bradykinesia, dyskinesia, and hyperkinesia.

Abstract: An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.

Abstract: An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.

Abstract: A method of assessing the likelihood that an individual has impulse control disorder. The individual is provided with an actuator, and instructed to actuate the actuator as an acknowledgement of when the individual has completed a reward task. Actuation of the actuator is monitored and recorded. An automated diagnosis of ICD is produced and output, wherein a greater degree of actuation of the actuator by the individual is taken to indicate a greater likelihood that the individual has impulse control disorder.

Abstract: In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.

Abstract: An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.

Abstract: In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.

Abstract: A method for managing a returns process in response to product alerts is provided. The method includes receiving an alert related to a product. The method also includes processing the alert into an alert repository. The method further includes retrieving product data based on the alert. The method further includes associating the product data with the alert. The method further includes facilitating a return of the product to a vendor using the product data. The method further includes receiving data in response to the return of the product. The method further includes providing an actionable display including the product data, the data in response to the return, and data related to a return action.

Abstract: The present invention relates to an automated method of determining a kinetic state of a person. The method obtains accelerometer data from an accelerometer worn on an extremity of the person and processes the accelerometer data to determine a measure for the kinetic state. The present invention further relates to a device for determining a kinetic state of a person. The device comprises a processor configured to process data obtained from an accelerometer worn on an extremity of the person and to determine from the data a measure for the kinetic state. In the method and system the kinetic state is at least one of bradykinesia, dyskinesia, and hyperkinesia.

Abstract: A method and a processing device may be provided for creating a shadow database, having a size being approximately a desired percentage of a size of a relational database. Referential integrity of tables of the relational database may be preserved in the created shadow database. A representation of a connected graph may be created, based on a schema description of the relational database, and may be used to find driving tables and related tables of the relational database. Portions of driving tables of the relational database may be copied to corresponding tables of the shadow database and rows of tables of the relational database, related to the copied portions of the driving tables, may be copied to corresponding tables of the shadow database in a number of iterations until the size of the shadow database is approximately the desired percentage of the size of the relational database.