Abstract: The invention is directed to a patterned aerogel-based layer that serves as a mold for at least part of a microelectromechanical feature. The density of an aerogel is less than that of typical materials used in MEMS fabrication, such as poly-silicon, silicon oxide, single-crystal silicon, metals, metal alloys, and the like. Therefore, one may form structural features in an aerogel-based layer at rates significantly higher than the rates at which structural features can be formed in denser materials. The invention further includes a method of patterning an aerogel-based layer to produce such an aerogel-based mold. The invention further includes a method of fabricating a microelectromechanical feature using an aerogel-based mold. This method includes depositing a dense material layer directly onto the outline of at least part of a microelectromechanical feature that has been formed in the aerogel-based layer.

Abstract: A steerable projectile comprises a pressure chamber to hold gas in a pressurized state; and a body section coupled to the pressure chamber, the body section having a flight system to use the pressurized gas for adjusting a trajectory of the projectile. The pressure chamber comprises an orifice in a wall of the pressure chamber; and a check valve corresponding to the orifice, the check valve configured to allow gas that results from ignition of a propellant to enter the pressure chamber via the corresponding orifice and to prevent the gas, once inside the pressure chamber, from exiting the pressure chamber via the corresponding orifice.

Abstract: An apparatus and method for providing isolation between components in microfabricated devices is provided. In one embodiment, a microfabricated device comprises: a base layer; a microfabricated component; and a non-sacrificial aerogel layer in contact with the microfabricated component and supporting the microfabricated thermal component on the base layer. The non-sacrificial aerogel layer is positioned to provide at least one of thermal, electrical or acoustic isolation between the microfabricated thermal component and the base layer.

Abstract: A steerable projectile comprises a pressure chamber to hold gas in a pressurized state; and a body section coupled to the pressure chamber, the body section having a flight system to use the pressurized gas for adjusting a trajectory of the projectile. The pressure chamber comprises an orifice in a wall of the pressure chamber; and a check valve corresponding to the orifice, the check valve configured to allow gas that results from ignition of a propellant to enter the pressure chamber via the corresponding orifice and to prevent the gas, once inside the pressure chamber, from exiting the pressure chamber via the corresponding orifice.

Abstract: Systems and methods are operable to focus light. An exemplary embodiment has a MEMS substrate, a first cylindrical lens having a first cylindrical surface, and a second cylindrical lens having a second cylindrical surface that is oriented perpendicular to the first cylindrical surface. Light passing through the first and second cylindrical lenses is focused.

Abstract: Systems and methods are operable to focus light. An exemplary embodiment has a MEMS substrate, a first cylindrical lens having a first cylindrical surface, and a second cylindrical lens having a second cylindrical surface that is oriented perpendicular to the first cylindrical surface. Light passing through the first and second cylindrical lenses is focused.

Abstract: The invention is directed to a patterned aerogel-based layer that serves as a mold for at least part of a microelectromechanical feature. The density of an aerogel is less than that of typical materials used in MEMS fabrication, such as poly-silicon, silicon oxide, single-crystal silicon, metals, metal alloys, and the like. Therefore, one may form structural features in an aerogel-based layer at rates significantly higher than the rates at which structural features can be formed in denser materials. The invention further includes a method of patterning an aerogel-based layer to produce such an aerogel-based mold. The invention further includes a method of fabricating a microelectromechanical feature using an aerogel-based mold. This method includes depositing a dense material layer directly onto the outline of at least part of a microelectromechanical feature that has been formed in the aerogel-based layer.

Abstract: A cylindrical cam apparatus attached to the lower hinge of an automobile door; adjusted as such to automatically spread the hinge leaves apart during closing thereof, thus compensating for hinge assembly wear, restoring smooth and complete latching function of vehicle door.

Abstract: Methods and structural configurations of modular barrier systems and cutoff walls used to isolate contaminated soils from the environment in situ. The cutoff walls comprise plastic sheets, preferably of high density polyethylene, inserted in or adjacent to dense soil (such as bentonite modified) walls, and they are connected to each other with tubular connectors having flaps to which the plastic sheets are connected, preferably by welding.

Abstract: A rose retaining system comprising a mounting plate, rose, rose mounting screw and washer. The mounting plate is mounted to the door by screws passing through holes in the mounting plate. The rose plate is mounted to the mounting plate by the rose mounting screw. The rose mounting screw has a externally threaded tubular portion which passes through the center of the rose and is threaded into the internally threaded tubular projection of the mounting plate. The rose mounting screw is threaded until the slotted collar contacts the recessed shoulder of the rose plate. The key is then used to tightened the rose mounting screw, securing the rose plate in the desired position. The key can be used whether or not the spindle is mounted through the axially aligned openings of the mounting plate, rose and rose mounting screw. After mounting is completed, the exterior surface of the collar of the rose mounting screw is recessed below the outer surface of the rose mounting plate.

Abstract: To provide for improved uniformity of photoresist developing of silicon wafers, developer solution is injected via an inlet port through a set of holes in a surface in a chuck and distributed across the wafer thereby developing the wafer pattern. A second set of holes in the same surface of the chuck act as exhaust outlets for the used developer. An end point detector is associated with an outlet duct. This design provides great uniformity potential since it is a single wafer system, and the holes and fluid flows can be adjusted as needed. Also, this design requires minimum developer volume which means end point detection can take place using the waste developer at the outlet. Test such as optical density or color, PH or normality, density, or others can detect photoresist content in effluent to determine completion.

Abstract: Thin films of chromium/silicon/nitrogen are etched in a solution of HF, H.sub.2 O.sub.2, HCl, and H.sub.2 O.

Abstract: A method of etching a thin film containing chromium using fluorine or a fluorine containing compound without leaving an electrically conductive residue is described.