Abstract: The present invention provides dynamic metrology methods and systems for: periodically determining an actual position of one or more of a machine and a tool with respect to a workpiece using one or more laser interferometers; tracking a tracked position of the one or more of the machine and the tool with respect to the workpiece using one or more accelerometers; and altering a controlled position of the one or more of the machine and the tool with respect to the workpiece when either the actual position or the tracked position of the one or more of the machine and the tool with respect to the workpiece diverges from a desired position of one or more of the machine and the tool with respect to the workpiece.

Abstract: The present invention provides dynamic metrology methods and systems for: periodically determining an actual position of one or more of a machine and a tool with respect to a workpiece using one or more laser interferometers; tracking a tracked position of the one or more of the machine and the tool with respect to the workpiece using one or more accelerometers; and altering a controlled position of the one or more of the machine and the tool with respect to the workpiece when either the actual position or the tracked position of the one or more of the machine and the tool with respect to the workpiece diverges from a desired position of one or more of the machine and the tool with respect to the workpiece.

Abstract: An oscillating probe of an elongated rod, having a first free end, and a second end that is attached to at least one actuator to apply oscillation cycles to the rod. Oscillation of the elongated rod during at least one complete cycle of oscillation of the actuator causes the free end to move in at least one-dimensional envelope, producing a defined virtual probe tip geometry at the free end. The probe is connected to a system for utilizing information sensed as the free end is placed near a surface.

Abstract: A force characterization device utilizes a flexure having a compliant portion and a solid portion. During operation of a coordinate measuring machine (CMM) on the solid portion of the flexure, a first capacitance probe detects displacement of the solid portion of the flexure in a first dimension and a second capacitance probe detects displacement of the solid portion of the flexure in a second dimension perpendicular to the first dimension. The detected displacements in the first and second dimensions of the solid portion of the flexure are correlated to forces applied to the flexure in the first and second dimensions based on the detected displacements and the predetermined spring constant of the compliant portion of the flexure. A total applied force is determined based on the forces applied to the flexure in the first and second dimensions. The flexure may be utilized for touch-trigger operations or scanning operations of the CMM.

Abstract: A tracking system for measuring at least the spatial coordinates of a target and possibly the angular orientation of the target. A collimated beam is directed to the target and a mirror attached to the target reflects this beam back to a tracking point. Photosensors attached to the tracking or target point provide error signals to a servo system which controls optics at the tracking or target points to provide the direction necessary to accomplish the coincidence of the beams. An interferometer interferes the source beam with the beam that has travelled twice between the tracking and target points in order to measure the separation. By measuring the directions of the beams relative to structure attached to the tracking and target points, the target point can be located in spatial coordinates and additionally the orientation of the target structure can be determined.