Patents by Inventor Robert J. Mitchell

Robert J. Mitchell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230287561
    Abstract: A system comprising a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on the spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The spinning disk rotates about a central axis. The spinning disk is also translated linearly in a directional perpendicular to the central axis. The spot ion beam strikes the spinning disk at a distance from the central axis, referred to as the radius of impact. The rotation rate and the scan velocity may both vary inversely with the radius of impact.
    Type: Application
    Filed: March 14, 2022
    Publication date: September 14, 2023
    Inventors: Stanislav S. Todorov, Robert J. Mitchell, Joseph C. Olson, Frank Sinclair
  • Patent number: 11217433
    Abstract: Disclosed is a rotary union including an inner shaft, wherein the inner shaft is rotatable and includes an internal channel operable to deliver a cryogenic fluid to a platen. The rotary union may further include a rotary union shaft surrounding the inner shaft, and a seal assembly coupled to the rotary union shaft. The seal assembly may include a support, a metal bellows extending around an exterior of the support, and a seal support coupled to the metal bellows, wherein the seal support extends around the support. The seal assembly may further include a non-rotating seal component seated in the seal support, and a rotating seal component in abutment with the non-rotating seal component to create a mechanical seal therebetween.
    Type: Grant
    Filed: October 5, 2018
    Date of Patent: January 4, 2022
    Assignee: APPLIED Materials, Inc.
    Inventors: Robert J. Mitchell, Guillermo Colom
  • Patent number: 10971327
    Abstract: A cryogenic heat transfer system including a platen supported by a rotatable shaft, a housing surrounding a portion of the rotatable shaft, the housing including an annular heat sink surrounding the rotatable shaft and defining a heat transfer gap between the heat sink and the rotatable shaft, the heat sink including a fluid conduit extending therethrough for circulating a first cooling fluid through the heat sink, a first dynamic seal arrangement extending from a first axial end of the heat sink and surrounding the rotatable shaft, and a second dynamic seal arrangement extending from a second axial end of the heat sink opposite the first axial end and radially surrounding the rotatable shaft, wherein the heat sink and the first and second dynamic seal arrangements define a fluidically sealed volume surrounding the rotatable shaft, the fluidically sealed volume containing a second cooling fluid.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: April 6, 2021
    Assignee: Applied Materials, Inc.
    Inventor: Robert J. Mitchell
  • Patent number: 10832926
    Abstract: An ion implantation apparatus, system, and method are provided for transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
    Type: Grant
    Filed: December 27, 2016
    Date of Patent: November 10, 2020
    Assignee: Axcelis Technologies, Inc.
    Inventors: Joseph Ferrara, Robert J. Mitchell
  • Publication number: 20200111686
    Abstract: Disclosed is a rotary union including an inner shaft, wherein the inner shaft is rotatable and includes an internal channel operable to deliver a cryogenic fluid to a platen. The rotary union may further include a rotary union shaft surrounding the inner shaft, and a seal assembly coupled to the rotary union shaft. The seal assembly may include a support, a metal bellows extending around an exterior of the support, and a seal support coupled to the metal bellows, wherein the seal support extends around the support. The seal assembly may further include a non-rotating seal component seated in the seal support, and a rotating seal component in abutment with the non-rotating seal component to create a mechanical seal therebetween.
    Type: Application
    Filed: October 5, 2018
    Publication date: April 9, 2020
    Applicant: APPLIED Materials, Inc.
    Inventors: Robert J. Mitchell, Guillermo Colom
  • Patent number: 10157763
    Abstract: Systems and methods for facilitating expeditious handling and processing of semiconductor substrates with a minimal number of handling devices. Such a system may include an entry load-lock configured to transfer substrates from an atmospheric environment to a vacuum chamber, an alignment station disposed in the vacuum chamber and configured to adjust orientations of substrates, a first vacuum robot configured to move substrates from the entry load-lock to the alignment station, a process station disposed in the vacuum chamber and configured to perform a designated process on substrates, first and second exit load-locks configured to transfer substrates from the vacuum chamber to the atmospheric environment, and a second vacuum robot configured to move substrates from the alignment station to the process station and further configured to move substrates from the process station to the first exit load-lock and to the second exit load-lock in an alternating fashion.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: December 18, 2018
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Robert J. Mitchell, Eric Hermanson, Benjamin B. Riordon
  • Patent number: 10152033
    Abstract: Embodiments of the disclosure provide proportional integral derivative control (PID) using multiple actuators. In one embodiment, a process includes providing a PID controller in communication with a primary actuator and a secondary actuator, the primary actuator and the secondary actuator coupled to a handler. The process further includes receiving position feedback and a specified trajectory for the handler, and generating a dynamic feedforward force command and a position correction command for the handler based on the position feedback and the specified trajectory. The process further includes providing, from the PID controller, the dynamic feedforward force command to the secondary actuator and the position correction command to the primary actuator.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: December 11, 2018
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Jack J. LoPiccolo, Robert J. Mitchell
  • Patent number: 9891599
    Abstract: Embodiments of the disclosure provide proportional integral derivative control (PID) using multiple actuators. In one embodiment, a process includes providing a PID controller in communication with a primary actuator and a secondary actuator, the primary actuator and the secondary actuator coupled to a handler, such as a robotic arm for manipulating an object. The process further includes receiving position feedback and a specified trajectory for the handler, and generating a dynamic feedforward force command and a position correction command for the handler based on the position feedback and the specified trajectory. The process further includes providing, from the PID controller, the dynamic feedforward force command to the secondary actuator and the position correction command to the primary actuator.
    Type: Grant
    Filed: February 1, 2016
    Date of Patent: February 13, 2018
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Jack J. LoPiccolo, Robert J. Mitchell
  • Publication number: 20170220006
    Abstract: Embodiments of the disclosure provide proportional integral derivative control (PID) using multiple actuators. In one embodiment, a process includes providing a PID controller in communication with a primary actuator and a secondary actuator, the primary actuator and the secondary actuator coupled to a handler, such as a robotic arm for manipulating an object. The process further includes receiving position feedback and a specified trajectory for the handler, and generating a dynamic feedforward force command and a position correction command for the handler based on the position feedback and the specified trajectory. The process further includes providing, from the PID controller, the dynamic feedforward force command to the secondary actuator and the position correction command to the primary actuator.
    Type: Application
    Filed: February 1, 2016
    Publication date: August 3, 2017
    Inventors: Jack J. LoPiccolo, Robert J. Mitchell
  • Publication number: 20170220007
    Abstract: Embodiments of the disclosure provide proportional integral derivative control (PID) using multiple actuators. In one embodiment, a process includes providing a PID controller in communication with a primary actuator and a secondary actuator, the primary actuator and the secondary actuator coupled to a handler. The process further includes receiving position feedback and a specified trajectory for the handler, and generating a dynamic feedforward force command and a position correction command for the handler based on the position feedback and the specified trajectory. The process further includes providing, from the PID controller, the dynamic feedforward force command to the secondary actuator and the position correction command to the primary actuator.
    Type: Application
    Filed: March 4, 2016
    Publication date: August 3, 2017
    Inventors: Jack J. LoPiccolo, Robert J. Mitchell
  • Publication number: 20170178933
    Abstract: An ion implantation apparatus, system, and method are provided for transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
    Type: Application
    Filed: December 27, 2016
    Publication date: June 22, 2017
    Inventors: Joseph Ferrara, Robert J. Mitchell
  • Patent number: 9484183
    Abstract: An ion implantation apparatus including an enclosure defining a process chamber, a carriage slidably mounted on a shaft within the process chamber and coupled to a drive mechanism adapted to selectively move the carriage along the shaft. A platen assembly can be coupled to the carriage, and a linkage conduit can extend between a side wall of the enclosure and the carriage. The linkage conduit can include a plurality of pivotably interconnected linkage members that define a contiguous internal volume that is sealed from the process chamber. The contiguous volume can be held at a desired vacuum pressure separate from the vacuum environment of the process chamber.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: November 1, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Eric D. Hermanson, Robert J. Mitchell, Steven Anella, Jeffrey Charles Blahnik, William T. Weaver, Michael Rohrer, James P. Buonodono
  • Patent number: 9415508
    Abstract: A substrate scanning device includes first, second and third linkages, and a direct drive motor coupled between a process chamber and a first end of the first linkage. A first gear motor coupled between a second end of the first linkage and a first end of the second linkage and a second gear motor coupled between a second end of the second linkage and a first end of the third linkage. A substrate support surface coupled to a second end of the third linkage. The direct drive motor for moving the substrate support surface parallel to a scan axis as the direct drive motor moves the substrate support surface along the scan axis. The first and second gear motors can be configured to maintain the substrate support surface in a plane approximately parallel with the scan axis.
    Type: Grant
    Filed: May 15, 2015
    Date of Patent: August 16, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Robert J. Mitchell, William Weaver
  • Publication number: 20160071686
    Abstract: An ion implantation apparatus including an enclosure defining a process chamber, a carriage slidably mounted on a shaft within the process chamber and coupled to a drive mechanism adapted to selectively move the carriage along the shaft. A platen assembly can be coupled to the carriage, and a linkage conduit can extend between a side wall of the enclosure and the carriage. The linkage conduit can include a plurality of pivotably interconnected linkage members that define a contiguous internal volume that is sealed from the process chamber. The contiguous volume can be held at a desired vacuum pressure separate from the vacuum environment of the process chamber.
    Type: Application
    Filed: September 10, 2014
    Publication date: March 10, 2016
    Inventors: Eric D. Hermanson, Robert J. Mitchell, Steven Anella, Jeffrey Charles Blahnik, William T. Weaver, Michael Rohrer, James P. Buonodono
  • Publication number: 20150063954
    Abstract: Systems and methods for facilitating expeditious handling and processing of semiconductor substrates with a minimal number of handling devices. Such a system may include an entry load-lock configured to transfer substrates from an atmospheric environment to a vacuum chamber, an alignment station disposed in the vacuum chamber and configured to adjust orientations of substrates, a first vacuum robot configured to move substrates from the entry load-lock to the alignment station, a process station disposed in the vacuum chamber and configured to perform a designated process on substrates, first and second exit load-locks configured to transfer substrates from the vacuum chamber to the atmospheric environment, and a second vacuum robot configured to move substrates from the alignment station to the process station and further configured to move substrates from the process station to the first exit load-lock and to the second exit load-lock in an alternating fashion.
    Type: Application
    Filed: August 29, 2013
    Publication date: March 5, 2015
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Robert J. Mitchell, Eric Hermanson, Benjamin B. Riordon
  • Patent number: 8939451
    Abstract: An apparatus that uses a combination of mechanical contact bearings and air bearings is disclosed. The apparatus includes a fixed seal housing, attached to a process chamber and a floating seal cartridge, which is disposed in proximity to the fixed seal housing. A shaft is disposed with an aperture in the process chamber, the central opening in the fixed seal housing and the second central opening in the floating seal cartridge. A first air bearing is created between the shaft and the floating seal cartridge in the second central opening. A second air bearing is created between the floating seal cartridge and the fixed seal housing. In this way, the floating seal cartridge is free to move with the shaft radially, while still maintaining a seal between the process chamber and the external environment.
    Type: Grant
    Filed: March 11, 2013
    Date of Patent: January 27, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Robert J. Mitchell, Elaina Noelle Babayan
  • Patent number: 8935095
    Abstract: Various embodiments of a device, system and methods that promote safety and security within an organization. Sensor data from one or more installation sensors is collected, analyzed and used to create a map and/or directions that, when received by a wireless mobile device, facilitate a person's possible egress around or from a detected event. The information provided to the person by the map and/or the directions may be individually crafted to be of maximum use to the specific recipient so the person can understand, plan and execute the most appropriate danger avoidance maneuvers in minimal time.
    Type: Grant
    Filed: September 16, 2009
    Date of Patent: January 13, 2015
    Assignee: UTC Fire & Security Americas Corporation, Inc.
    Inventors: Michael James Hartman, John E. Hershey, Robert J. Mitchell, Jr.
  • Patent number: 8915136
    Abstract: A method is provided of determining the internal cross-sectional area of a pipe along its length. The method includes the steps of: (a) filling the pipe with a first fluid; (b) feeding a second fluid into the pipe at a known flow rate, a meniscus being formed between the first and the second fluid, and the meniscus moving along the pipe as the second fluid displaces the first fluid in the pipe; (c) ultrasonically detecting the position of the meniscus as it moves along the pipe; and (d) determining from the second fluid flow rate and the meniscus position, the internal cross-sectional area of the pipe along its length.
    Type: Grant
    Filed: April 4, 2012
    Date of Patent: December 23, 2014
    Assignee: Rolls-Royce PLC
    Inventors: Anthony G. Razzell, Robert J. Mitchell
  • Patent number: 8869638
    Abstract: A method for inspecting the interior of a non-horizontal pipe includes (a) filling the pipe with a first fluid, (b) feeding a second fluid into a lower part of the pipe when the second fluid is more dense than the first fluid or into an upper part of the pipe when the second fluid is less dense than the second fluid the pipe, a meniscus forming between the first and the second fluid and moving along the pipe, (c) introducing an inspection device having an average density between the densities of the first and second fluids such that the device locates at and moves with the meniscus, (d) obtaining inspection data from the inspection device as the device moves along the pipe, (e) determining positions of the meniscus as it moves along the pipe, and (f) relating the meniscus positions to positions at which the inspection data is obtained.
    Type: Grant
    Filed: April 4, 2012
    Date of Patent: October 28, 2014
    Assignee: Rolls-Royce PLC
    Inventors: Anthony G. Razzell, Robert J. Mitchell
  • Patent number: 8858874
    Abstract: A ternary nickel eutectic alloy consisting of 4.5 to 11 wt % chromium, 1 to 6 wt % cobalt, 1 to 4 wt % aluminum, 0 to 1.5 wt % titanium, 0 to 3 wt % tantalum, 16 to 22 wt % niobium, 0 to 3 wt % molybdenum, 0 to 4 wt % tungsten, 0 to 1 wt % hafnium, 0 to 0.1 wt % zirconium, 0 to 0.1 wt % silicon, 0.01 to 0.1 wt % carbon, 0 to 0.01 wt % boron and the balance nickel plus incidental impurities.
    Type: Grant
    Filed: September 2, 2008
    Date of Patent: October 14, 2014
    Assignee: Rolls-Royce PLC
    Inventors: Sammy Tin, Robert J Mitchell