Patents by Inventor Robert J. Navasca

Robert J. Navasca has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Modular gas panel closet for a semiconductor wafer processing platform
    Patent number: 6523563
    Abstract: An apparatus for providing facilities gas lines to a plurality of processing chambers. The apparatus comprises a rack having at least one modular gas control panel coupled thereon. A plurality of gas control panel feeds is coupled between the facilities gas lines and at least one gas control panel. Process gases are provided to individual chambers by a plurality of chamber gas lines are respectively coupled between at least one gas control panel and the plurality of processing chambers.
    Type: Grant
    Filed: February 28, 2001
    Date of Patent: February 25, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Thomas Cho, Robert J. Navasca, Tetsuya Ishikawa
  • Modular gas panel closet for a semiconductor wafer processing platform
    Publication number: 20020011268
    Abstract: An apparatus for providing facilities gas lines to a plurality of processing chambers. The apparatus comprises a rack having at least one modular gas control panel coupled thereon. A plurality of gas control panel feeds is coupled between the facilities gas lines and at least one gas control panel. Process gases are provided to individual chambers by a plurality of chamber gas lines are respectively coupled between at least one gas control panel and the plurality of processing chambers.
    Type: Application
    Filed: February 28, 2001
    Publication date: January 31, 2002
    Inventors: Thomas Cho, Robert J. Navasca, Tetsuya Ishikawa