Patents by Inventor Robert J. Salter

Robert J. Salter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8989478
    Abstract: A system for providing visualization of semiconductor wafer inspection data acquired during in a photovoltaic cell production process includes a display device, a user interface device, and a computer control system configured for: receiving one or more inspection data sets acquired from each of a plurality of semiconductor wafers using a plurality of wafer process tools of a photovoltaic cell production line; generating an aggregated hierarchical wafer data gallery utilizing the received one or more inspection data sets; and displaying at least a portion of the aggregated hierarchical wafer data gallery in the gallery display area of the display device.
    Type: Grant
    Filed: July 26, 2012
    Date of Patent: March 24, 2015
    Assignee: KLA-Tencor Corporation
    Inventor: Robert J. Salter
  • Publication number: 20130028506
    Abstract: A system for providing visualization of semiconductor wafer inspection data acquired during in a photovoltaic cell production process includes a display device, a user interface device, and a computer control system configured for: receiving one or more inspection data sets acquired from each of a plurality of semiconductor wafers using a plurality of wafer process tools of a photovoltaic cell production line; generating an aggregated hierarchical wafer data gallery utilizing the received one or more inspection data sets; and displaying at least a portion of the aggregated hierarchical wafer data gallery in the gallery display area of the display device.
    Type: Application
    Filed: July 26, 2012
    Publication date: January 31, 2013
    Applicant: KLA-TENCOR CORPORATION
    Inventor: Robert J. Salter
  • Publication number: 20040258295
    Abstract: A population of data points each having three or more parameters associated therewith, such as multi-channel defect data from an optical scanner, are plotted in three dimensions, and groupings of data points are identified. Boundary surfaces are defined in the three-dimensional space for delineating groupings of data points. The different groupings correspond to different data classifications or types. Classification algorithms based on the boundary surfaces are defined. When applied to defect classification, the algorithms can be exported to an optical scanner for runtime classification of defects. An algorithm for identifying a particular grouping of data points can be defined as a Boolean combination of grouping rules from two or more different n-dimensional representations, where n can be either 2 or 3 for each representation.
    Type: Application
    Filed: June 10, 2004
    Publication date: December 23, 2004
    Applicant: ADE Corporation
    Inventors: Timothy R. Tiemeyer, James S. Akutsu, Robert J. Salter, Yu Zeng
  • Patent number: 4787982
    Abstract: Continuous flow membrane separation is accomplished by apparatus adaptable for osmosis, dialysis, and electrodialysis. For electrodialysis to separate from one another, in a single step, multiple differing molecular weight components of fluids, a series of adjoining flow chambers are all separated from one another by semipermeable membranes and at least one of the chambers is separated from each adjoining chamber by a membrane having a molecular weight cutoff different from that of the membrane separating it from the other chamber adjoining it. To insure that neither the crude to be processed nor the desired product comes into contact with an electrode which could be deleterious, there is provided a minimum of four flow chambers adjoining one another in sequence.
    Type: Grant
    Filed: December 9, 1986
    Date of Patent: November 29, 1988
    Inventors: Ricardo F. Caro, Robert J. Salter