Abstract: Disclosed is a range of resistor compositions which exhibit a stability of less than 0.5 percent change in resistance after 2,000 hours at 175.degree. C., and yet which also have a temperature coefficient of resistance less than + or -25 ppm per degree Celsius. These compositions all comprise alloys of nickel, chromium and silicon, within a selected range. Also, disclosed is a method of manufacturing these compositions on a reproducible basis. The method includes the provision of a first silicon target and a second nickel chromium target and the subjecting of these targets to a sputtering gas and electrical potential such that the aforementioned silicon, nickel, chromium alloys are formed.