Abstract: A robotic under surface loader includes a mobility platform, a parallel manipulator, and a cradle. The mobility platform enables the robotic under surface loader to be moved into place beneath a downwardly facing surface to which a payload is to be attached. The parallel manipulator, which is carried by the mobility platform, carries the cradle, which may in turn carry a payload. The parallel manipulator may position the cradle in six degrees-of-freedom and, thus, precisely position a payload carried by the cradle in a location and an orientation that will facilitate its interaction with (e.g., attachment to, etc.) the downwardly facing surface. Methods for attaching objects, including large, heaving objects, to downwardly facing surfaces are also disclosed.

Abstract: A frame walker robot based on two sections connected by a parallel mechanism is described. The walker can step in any direction and can pose its free section in any orientation. Prismatic, rather than revolute, joints are used, leading to a scalable design.

Abstract: A scalable and adaptable, six-degree-of-freedom, kinematic positioning system is described. The system can position objects supported on top of, or suspended from, jacks comprising constrained joints. The system is compatible with extreme low temperature or high vacuum environments. When constant adjustment is not required a removable motor unit is available.

Abstract: A frame walker robot based on two sections connected by a parallel mechanism is described. The walker can step in any direction and can pose its free section in any orientation. Prismatic, rather than revolute, joints are used, leading to a scalable design.

Abstract: A scalable and adaptable, six-degree-of-freedom, kinematic positioning system is described. The system can position objects supported on top of, or suspended from, jacks comprising constrained joints. The system is compatible with extreme low temperature or high vacuum environments. When constant adjustment is not required a removable motor unit is available.

Abstract: The invention features an apparatus for mounting a pellicle to a reticle. The apparatus includes: a base; a first holder coupled to the base and including two edges positioned to support a first object below its center of gravity and secure the first object in substantially vertical alignment with the base, the first object including one of the pellicle and the reticle; a second holder slidably coupled to the base and including two edges positioned to support a second object below its center of gravity and secure the second object in substantially vertical alignment with the base, the second object including the other of the pellicle and the reticle; and a pressure applicator assembly slidably coupled to the base to adjustably apply pressure to a periphery of the second object held in the second holder and drive it against a corresponding periphery of the first object held in the first holder. In additional embodiments, the apparatus provides automated mounted of the pellicle and reticle.

Abstract: A device for automatically opening a cassette includes a holding mechanism, an unlatching mechanism and an opening mechanism. The cassette to be opened has a top portion hingedly fixed to a bottom portion, the top portion being pivotable between a closed and an open position relative to the bottom portion, the cassette having a latch movable between an engaged position for securing the top portion to the bottom portion when the cassette is in the closed position and a disengaged position for allowing the top portion to pivot relative to the bottom portion to the open position. The holding mechanism is for receiving the cassette and securing the bottom portion of a received cassette.

Abstract: The invention features an apparatus for mounting a pellicle to a reticle. The apparatus includes: a base; a first holder coupled to the base and including two edges positioned to support a first object below its center of gravity and secure the first object in substantially vertical alignment with the base, the first object including one of the pellicle and the reticle; a second holder slidably coupled to the base and including two edges positioned to support a second object below its center of gravity and secure the second object in substantially vertical alignment with the base, the second object including the other of the pellicle and the reticle; and a pressure applicator assembly slidably coupled to the base to adjustably apply pressure to a periphery of the second object held in the second holder and drive it against a corresponding periphery of the first object held in the first holder. In additional embodiments, the apparatus provides automated mounted of the pellicle and reticle.