Patents by Inventor Robert James Nolan

Robert James Nolan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for reducing photo-mask distortion
    Patent number: 7473501
    Abstract: The present invention describes a structure and method for reducing or eliminating the flatness distortion effects of a photomask assembly which occurs when a pellicle is mounted to the photomask. The invention is to perform a partial disconnection of the mounting area of the pellicle frame from the print area of the mask. An exemplary embodiment of the present invention achieves the distortion reduction or elimination using a trench in the photomask as the partial disconnection.
    Type: Grant
    Filed: March 30, 2008
    Date of Patent: January 6, 2009
    Assignee: International Business Machines Corporation
    Inventors: Nancy Chenxin Zhou, Kenneth C Racette, Robert James Nolan