Abstract: A method and apparatus for controlling ion beam scanning in an ion implanter is disclosed. Before an implant process is commenced, a scan waveform to create a uniform distribution along a magnetic scan axis is determined, using a travelling Faraday detector (24). Charge data from the travelling Faraday (24) is collected into a small, finite number of channels and this is used to create a histogram of collected charge vs. beam crossing time. This is in turn used to correct a target scan velocity to compensate for any dose non-uniformity. The target scan velocity is used as a first input to a fast feedback loop. A second input is obtained by digitizing the output of an inductive pickup in the magnet of the magnetic scanner in the ion implanter. Each input is separately integrated and Fast Fourier Transformed Error coefficients Ferror are obtained by dividing. Fourier coefficients from the target scan velocity by Fourier coefficients from the inductive pickup signal.

Abstract: A method and apparatus for generating an accurate, stable phase shift (b) in a sinusoidal signal employs fast analog multiplication to implement the trigonometric relationship sin(&ohgr;t+b)=sin(&ohgr;t)cos(b)+cos(&ohgr;t) sin(b). Cos(&ohgr;t) is generated by accurately shifting a signal sin(&ohgr;t) through 90° C. using a delay line, for example. Sin(b) and cos(b) are dc signals generated by digital to analog conversion, using a demanded phase shift (b) whose sine and cosine are obtained from look-up tables. A controller for controlling a phase shift in an rf cavity is also disclosed and operates on the basis of the same trigonometrical principle. The amplitude of the signals in the rf cavity is also controllable; fast analog multipliers are again employed to scale the signal amplitude to a nominal fixed value such as 1 volt.

Abstract: A method and apparatus for generating an accurate, stable phase shift (b) in a sinusoidal signal employs fast analog multiplication to implement the trigonometric relationship sin(&ohgr;t+b)=sin(&ohgr;t)cos(b)+cos(&ohgr;t)sin(b). Cos(&ohgr;t) is generated by accurately shifting a signal sin(&ohgr;t) through 90° using a delay line, for example. Sin(b) and cos(b) are dc signals generated by digital to analogue conversion, using a demanded phase shift (b) whose sine and cosine are obtained from look-up tables. A controller for controlling a phase shift in an rf cavity is also disclosed and operates on the basis of the same trigonometrical principle. The amplitude of the signals in the rf cavity is also controllable; fast analogue multipliers are again employed to scale the signal amplitude to a nominal fixed value such as 1 volt.

Abstract: A method and apparatus for generating an accurate, table phase shift (b) in a sinusoidal signal employs fast analog multiplication to implement the trigonometric relationship sin(&ohgr;t+b)=sin(&ohgr;t)cos(b)+cos(&ohgr;t)sin(b). Cos (&ohgr;t) is generated by accurately shifting a signal sin(&ohgr;t) through 90° using a delay line, for example. Sin(b) and cos(b) are dc signals generated by digital to analogue conversion, using a demanded phase shift (b) whose sine and cosine are obtained from look-up tables. A controller for controlling a phase shift in an rf cavity is also disclosed and operates on the basis of the same trigonometrical principle. The amplitude of the signals in the rf cavity is also controllable; fast analogue multipliers are again employed to scale the signal amplitude to a nominal fixed value such as 1 volt.