Patents by Inventor Robert Judson HOLT

Robert Judson HOLT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Forming defect-free relaxed SiGe fins
    Patent number: 9882052
    Abstract: A method of forming defect-free relaxed SiGe fins is provided. Embodiments include forming fully strained defect-free SiGe fins on a first portion of a Si substrate; forming Si fins on a second portion of the Si substrate; forming STI regions between adjacent SiGe fins and Si fins; forming a cladding layer over top and side surfaces of the SiGe fins and the Si fins and over the STI regions in the second portion of the Si substrate; recessing the STI regions on the first portion of the Si substrate, revealing a bottom portion of the SiGe fins; implanting dopant into the Si substrate below the SiGe fins; and annealing.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: January 30, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Robert Judson Holt, Jinping Liu, Jody Fronheiser, Bharat Krishnan, Churamani Gaire, Timothy James McArdle, Murat Kerem Akarvardar
  • FORMING DEFECT-FREE RELAXED SIGE FINS
    Publication number: 20180006155
    Abstract: A method of forming defect-free relaxed SiGe fins is provided. Embodiments include forming fully strained defect-free SiGe fins on a first portion of a Si substrate; forming Si fins on a second portion of the Si substrate; forming STI regions between adjacent SiGe fins and Si fins; forming a cladding layer over top and side surfaces of the SiGe fins and the Si fins and over the STI regions in the second portion of the Si substrate; recessing the STI regions on the first portion of the Si substrate, revealing a bottom portion of the SiGe fins; implanting dopant into the Si substrate below the SiGe fins; and annealing.
    Type: Application
    Filed: June 30, 2016
    Publication date: January 4, 2018
    Inventors: Robert Judson HOLT, Jinping LIU, Jody FRONHEISER, Bharat KRISHNAN, Churamani GAIRE, Timothy James MCARDLE, Murat Kerem AKARVARDAR