Abstract: Optical information processor and storage of pixelated data pattern in a Fourier plane of a lens as achieved by a plurality of optical elements operating with a spatial light modulator. A laser light source illuminates a data pattern with a wavefront that is created by a phase mask to effect a phase shift. The optical information can be effecitvely processed or stored, for instance, in a holographic data storage system. The holographic data storage system for storing a data array contains illuminated and dark regions including a multi-fold phase shift mask. This affects a linear and non-random shift of an image. The image is stored on a holographic storage medium. There is a spatial light modulator between the input location for the optical data and the storage medium. The phase shift is effected in the Fourier plane.

Abstract: The invention relates to a reflective phase-shifting lithographic mask having a reflective surface comprising a plurality of areas having different refractive indices.

Abstract: A lithographic system for patterned exposure of radiation-sensitive resist comprises a radiation source, a mask, a converging optical element having a focal plane, and a phase-shifting optical element disposed at the focal plane of the converging optical element. The lithographic system produces enhanced images.

Abstract: A lithographic system for patterned exposure of radiation-sensitive resist. The system comprises a radiation source, a mask, a converging optical element having a focal plane, and a phase-shifting optical element disposed at the focal plane of the converging optical element. The lithographic system produces enhanced images.