Patents by Inventor Robert Kerschreiter

Robert Kerschreiter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Standard for calibrating and checking a surface inspection device and method for the production thereof
    Patent number: 6333785
    Abstract: The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is produced on a surface of a substrate provided as a standard, characterized in that the microstructure is smoothed out.
    Type: Grant
    Filed: November 12, 1999
    Date of Patent: December 25, 2001
    Assignee: Wacker Siltronic Gesellschaft für Halbleitermaterialien AG
    Inventors: Rüdiger Schmolke, Dieter Gräf, Robert Kerschreiter, Hans-Adolf Gerber, Anton Luger, Monique Suhren