Patents by Inventor Robert Kestner

Robert Kestner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Common path mode fiber tip diffraction interferometer for wavefront measurement
    Patent number: 11333487
    Abstract: Reference and test waves are directed in a common path mode in a fiber tip diffraction interferometer. A first fiber can be used to generate the reference wave and a second fiber can be used to generate the test wave. Each fiber can include a single mode fiber tip that defines a wedge at an end without a coating on end surface or a tapered fiber tip. The fiber tip diffraction interferometer can include an aplanatic pupil imaging lens or system disposed to receive both the test wave and the reference wave and a sensor configured to receive both the test wave and the reference wave.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: May 17, 2022
    Assignee: KLA CORPORATION
    Inventors: Haifeng Huang, Rui-Fang Shi, Dan Wack, Robert Kestner
  • COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT MEASUREMENT
    Publication number: 20210123716
    Abstract: Reference and test waves are directed in a common path mode in a fiber tip diffraction interferometer. A first fiber can be used to generate the reference wave and a second fiber can be used to generate the test wave. Each fiber can include a single mode fiber tip that defines a wedge at an end without a coating on end surface or a tapered fiber tip. The fiber tip diffraction interferometer can include an aplanatic pupil imaging lens or system disposed to receive both the test wave and the reference wave and a sensor configured to receive both the test wave and the reference wave.
    Type: Application
    Filed: March 13, 2020
    Publication date: April 29, 2021
    Inventors: Haifeng Huang, Rui-Fang Shi, Dan Wack, Robert Kestner