Abstract: A method for selectively coating the tops of pins of a pin chuck with a high thermal stability material, such as diamond-like carbon (DLC). Non-pin areas (“valleys”) of the pin chuck support surface are temporarily covered with glass frit or glass beads during the DLC coating operation. After coating, the glass frit/beads masking material may be removed, leaving the DLC material selectively coating the pin tops. The selective DLC coating avoids the cracking or warping problems due to CTE mismatch when DLC is coated over the entire pin chuck support surface, as the pin chuck material typically is very different from DLC.

Abstract: An oblique angle deposition is used to provide an A-plate optical retarder having at least one dense, form-birefringent layer. According to one embodiment, the dense, form-birefringent layer(s) are deposited as part of an FBAR stack to provide an all-dielectric full-function A/?C-plate trim retarder for LCD birefringence compensation. Advantageously, the dense structure of the full-function A/?C-plate trim retarder offers high durability and/or stability, thus making it well suited for providing polarization compensation in high light flux polarization-based projection systems.

Abstract: The present invention relates to a magnetron sputtering device and technique for depositing materials onto a substrate at a high production rate in which the deposited films have predictive thickness distribution and in which the apparatus can operate continuously and repeatedly for very long periods. The present invention has realized increased production by reducing cycle time. Increased coating rates are achieved by coupling a planetary drive system with a large cathode. The cathode diameter is greater than the diameter of a planet and less than twice the diameter of the planet. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask.

Abstract: An apparatus for monitoring the cure of a resin-impregnated material includes a pultrusion die; a plurality of first electrodes mounted in the pultrusion die; a plurality of insulators surrounding the plurality of first electrodes, respectively, in the pultrusion die; a resin-impregnated preform that includes a second electrode therein, the resin-impregnated preform being inserted into the pultrusion die; a constant contact electrode that contacts the second electrode; and a power supply connected to the constant contact electrode wherein electric current flows from the power supply to the constant contact electrode then to the second electrode then through the resin-impregnated preform to the plurality of first electrodes.