Abstract: Apparatus for Scanning Acoustic Microscopy (SAM) of a semiconductor device including a substrate with an acoustic probe, The substrate has upper and lower surfaces. A sealed lower space provides an environment surrounding the lower surface. An upper ring structure formed above the upper surface includes an upper sealing ring in contact with the upper surface, with the upper sealing structure and the seal forming a dam for retaining the acoustic transmission fluid above the upper surface. A fixture base retains a lower sealing ring in contact with the lower surface surrounding the lower surface. An acoustic scanning probe positioned confronting the upper surface of the semiconductor device extending into the acoustic transmission fluid retained in contact with the upper surface.

Abstract: Apparatus for Scanning Acoustic Microscopy (SAM) of a semiconductor device including a substrate with an acoustic probe, The substrate has upper and lower surfaces. A sealed lower space provides an environment surrounding the lower surface. An upper ring structure formed above the upper surface includes an upper sealing ring in contact with the upper surface, with the upper sealing structure and the seal forming a dam for retaining the acoustic transmission fluid above the upper surface. A fixture base retains a lower sealing ring in contact with the lower surface surrounding the lower surface. An acoustic scanning probe positioned confronting the upper surface of the semiconductor device extending into the acoustic transmission fluid retained in contact with the upper surface.

Abstract: A method for mounting a film, used to fabricate a mask for use in screening an electronic device, to a common carrier frame. The common carrier frame has an outer edge along an outer periphery and an opening in a central portion of the frame. The method includes applying external pressure to the frame outer edge to compress the frame inward and reduce the opening, securing a film to the frame, the film covering the frame opening, and releasing the pressure on the frame to expand the opening and place the film in tension.

Abstract: Disclosed is a flexible sheet handling apparatus including a frame having a vacuum passage located around the periphery of the frame. There is also a porous, polymeric plug which covers the vacuum passage. When a vacuum is applied to the vacuum passage and the porous, polymeric plug, a flexible sheet in contact with the porous, polymeric plug is uniformly held only around the periphery of the flexible sheet by the applied vacuum.

Abstract: A green sheet holding apparatus includes a first member secured to a first edge of the green sheet and a second member moveable relative to the first member, the second member being secured to a second edge of the green sheet. A forcing mechanism, connected to the second member and to the first member, forces the second member away from the first member such that the first edge and the second edge of the green sheet are forced away from each other and the green sheet is flattened. The holding apparatus may be included in a green sheet inspection system, wherein the inspection system further includes a light source directing a light onto the green sheet and a camera detecting light from the green sheet. The invention also includes a method of holding a green sheet, which includes securing the first edge of the green sheet to a first member, securing the second edge of the green sheet to a second member, and forcing the second member away from the first member.

Abstract: An article handler having a plurality of compartments in a frame with each compartment having a plurality of ribs extending across the compartments. The ribs in adjacent compartments extend perpendicularly to each other to provide resistance against warping of the frame in both directions, thereby maintaining the frame flat. The compartments are covered by filters. Suction is distributed throughout each compartment. When the filters are positioned in proximity to articles, the suction in the compartments is effective to lift the articles.

Abstract: A method and apparatus for measuring the x-y-z dimensions of an article such as a ceramic chip carrier are provided. The measuring apparatus and method utilize scanning laser beams to measure the dimensions of the article without physically contacting the article as the article is moved through the measuring device at a controlled speed preferably on a cushion of air. A separate laser beam scanning device is used to measure each dimension of the article and the laser beams are positioned to scan back and forth along the dimension to be measured. As the article moves through the preferred L-shaped apparatus, the direction of the article automatically changes in a transverse direction so that all three dimensions are conveniently and accurately measured.