Patents by Inventor Robert L. Benner

Robert L. Benner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6508697
    Abstract: A system for conditioning rotatable polishing pads used to planarize and polish surfaces of thin film integrated circuits deposited on semiconductor wafer substrates, microelectronic, and optical system. The system has a pad conditioning apparatus, process fluids, a vacuum capability to pull waste material out of the conditioning pad, self-contained flushing means, and a piezo-electric device for vibrating the pad conditioning apparatus.
    Type: Grant
    Filed: July 16, 2001
    Date of Patent: January 21, 2003
    Inventors: Robert Lyle Benner, Stephen J. Benner, Robert L. Benner
  • Publication number: 20030013381
    Abstract: A system for conditioning rotatable polishing pads used to planarize and polish surfaces of thin film integrated circuits deposited on semiconductor wafer substrates, microelectronic, and optical system. The system has a pad conditioning apparatus, process fluids, a vacuum capability to pull waste material out of the conditioning pad, self-contained flushing means, and a piezo-electric device for vibrating the pad conditioning apparatus.
    Type: Application
    Filed: July 16, 2001
    Publication date: January 16, 2003
    Inventors: Robert Lyle Benner, Stephen J. Benner, Robert L. Benner
  • Patent number: 5287661
    Abstract: A hand-held device is described for simultaneously sharpening the points of multiple fish hooks, particularly double and treble hooks in which the concave hook sharpening member is provided with abrasive surfaces for honing the hook points by longitudinal movement of the hook in the device.
    Type: Grant
    Filed: June 30, 1993
    Date of Patent: February 22, 1994
    Inventor: Robert L. Benner
  • Patent number: 4882878
    Abstract: Improved rigid grinding wheels are described which have a rigid organic matrix binding particulate diamond or cubin boron nitride abrasive uniformly dispersed therein between a plurality of spaced-apart apertures extending inwardly from the operative grinding surface of the matrix. The cross-sectional open area of the apertures in the matrix reduces the operative solid grinding surface and provides swarf relief while also increasing the effective concentration of a given amount of abrasive in the griding surface, this increasing the efficiency of the grinding wheel while reducing the cost of the wheel and power consumption in use.
    Type: Grant
    Filed: August 5, 1988
    Date of Patent: November 28, 1989
    Inventor: Robert L. Benner
  • Patent number: 4222204
    Abstract: A holder for an abrasive plate wherein a rigid plate is provided with a dress of abrasive grit on its contact face; a head on a shaft is provided with a peripheral flange defining a seat for a pad of magnetic material which is magnetically attracted to the seat defined by the flange and magnetically attracts the abrasive plate.
    Type: Grant
    Filed: June 18, 1979
    Date of Patent: September 16, 1980
    Inventor: Robert L. Benner