Abstract: A substrate support assembly and method for dechucking a substrate is provided. In one embodiment, a support assembly includes a substrate support having a support surface, a first set of lift pins and one or more other lift pins movably disposed through the substrate support. The first set of lift pins and the one or more lift pins project from the support surface when the pins are in an actuated position. When in the actuated position, the first set of lift pins project a longer distance from the support surface than the one or more other lift pins. In another aspect of the invention, a method for dechucking a substrate from a substrate support is provided. In one embodiment, the method includes the steps of projecting a first set of lift pins a first distance above a surface of a substrate support, and projecting a second set of lift pins a second distance above the surface of the substrate support that is less than the first distance.

Abstract: A lead-free bearing includes a bronze matrix powder metal bearing layer bonded to a steel backing a fully densified. The bearing material has about 8 to 12% by weight tin, about 1 to less than 5% by weight bismuth, and about 0.03 to 0.08% by weight phosphorus, with the balance being copper. The tin is soluable in the copper to yield the bronze matrix, and the bismuth exists as finely dispersed, undissolved islands through the matrix. Such bearings exhibit physical properties comparable to or better than those of traditional bronze-lead bearings and improved wear in seizure properties.

Abstract: A lead-free bearing includes a bronze matrix powder metal bearing layer bonded to a steel backing a fully densified. The bearing material has about 8 to 12% by weight tin, about 1 to less than 5% by weight bismuth, and about 0.03 to 0.08% by weight phosphorus, with the balance being copper. The tin is soluable in the copper to yield the bronze matrix, and the bismuth exists as finely dispersed, undissolved islands through the matrix. Such bearings exhibit physical properties comparable to or better than those of traditional bronze-lead bearings and improved wear in seizure properties.

Abstract: A lead-free bearing includes a bronze matrix powder metal bearing layer bonded to a steel backing a fully densified. The bearing material has about 8 to 12% by weight tin, about 1 to less than 5% by weight bismuth, and about 0.03 to 0.08% by weight phosphorus, with the balance being copper. The tin is soluable in the copper to yield the bronze matrix, and the bismuth exists as finely dispersed, undissolved islands through the matrix. Such bearings exhibit physical properties comparable to or better than those of traditional bronze-lead bearings and improved wear in seizure properties.

Abstract: A substrate support assembly and method for dechucking a substrate is provided. In one embodiment, a support assembly includes a substrate support having a support surface, a first set of lift pins and one or more other lift pins movably disposed through the substrate support. The first set of lift pins and the one or more lift pins project from the support surface when the pins are in an actuated position. When in the actuated position, the first set of lift pins project a longer distance from the support surface than the one or more other lift pins. In another aspect of the invention, a method for dechucking a substrate from a substrate support is provided. In one embodiment, the method includes the steps of projecting a first set of lift pins a first distance above a surface of a substrate support, and projecting a second set of lift pins a second distance above the surface of the substrate support that is less than the first distance.

Abstract: A lead-free bearing includes a bronze matrix powder metal bearing layer bonded to a steel backing a fully densified. The bearing material has about 8 to 12% by weight tin, about 1 to less than 5% by weight bismuth, and about 0.03 to 0.08% by weight phosphorus, with the balance being copper. The tin is soluable in the copper to yield the bronze matrix, and the bismuth exists as finely dispersed, undissolved islands through the matrix. Such bearings exhibit physical properties comparable to or better than those of traditional bronze-lead bearings and improved wear in seizure properties.

Abstract: A process for producing a composite billet employing powder metallurgical techniques in which a first alloy powder of a preselected composition is compacted in a tubular container producing a preliminarily compacted tubular mass which thereafter is finished on the interior surface thereof to desired final dimensions. The resultant tubular mass is placed in a second container and the core thereof is filled with a powder of a desired second alloy composition and the contents are sealed. The second alloy powder is subsequently hot compacted to a density approaching 100 percent theoretical density without incurring any appreciable distortion or dimensional change of the tubular mass. Thereafter, the preliminary composite compacted billet is subjected under elevated temperature to an axial extrusion step producing a final composite extruded billet having a concentric outer layer of a first alloy and an inner core layer of a second alloy metallurgically bonded together.