Patents by Inventor Robert L. Hartman

Robert L. Hartman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective plasma etching of dielectric masks in the presence of native oxides of group III-V compound semiconductors
    Patent number: 4227975
    Abstract: Plasma etching is described as a selective etch for dielectric masks such as SiO.sub.2, Si.sub.3 N.sub.4 and certain photoresists in the presence of native oxides of Group III-V compound semiconductors. This process can be used in the fabrication of mesa junction lasers and Burrus light emitting diodes.
    Type: Grant
    Filed: January 29, 1979
    Date of Patent: October 14, 1980
    Assignee: Bell Telephone Laboratories, Incorporated
    Inventors: Robert L. Hartman, Louis A. Koszi, Cyril J. Mogab, Bertram Schwartz