Patents by Inventor Robert L. Hubbard

Robert L. Hubbard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10854525
    Abstract: A method for densifying thermoplastics, particularly polyimides, for use in conjunction with electronic circuits while producing improved physical properties and a high degree of crystallinity, involves variable frequency microwave (VFM) processing at temperatures typically 100° C. below the glass transition temperature or lower, for times of about 50 to 100 minutes. It is particularly applicable to polymers based on BPDA-PPD, but may also be generally applied to other intentionally designed polyimide structures with the same features. The invention enables the creation of layered structures involving integrated circuits with small feature sizes and overcoatings of polymers with high Tg and other desirable properties.
    Type: Grant
    Filed: January 14, 2019
    Date of Patent: December 1, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventor: Robert L. Hubbard
  • Publication number: 20190378713
    Abstract: A multilayer structure comprises: a substrate; and, a plurality of polymerizable layers successively deposited on the substrate, with each successive layer having a greater dielectric polarizability than the preceding layer(s), so that each successive layer will absorb microwave energy preferentially to the preceding layer(s). In this way, successive layers can be cured without over-curing the preceding layers. The individual layers are preferably materials from a single chemical family (e.g., epoxies, polyimides, PBO, etc.) and have similar properties after curing. The dielectric polarizabilities may be adjusted by modifying such factors as chain endcap dipole strength, cross-linker dipole strength, promoter, solvent, and backbone type. The invention is particularly suitable for producing various polymer layers on silicon for electronic applications. An associated method is also disclosed.
    Type: Application
    Filed: August 23, 2019
    Publication date: December 12, 2019
    Inventors: Robert L. Hubbard, Iftikhar Ahmad
  • Publication number: 20190148252
    Abstract: A method for densifying thermoplastics, particularly polyimides, for use in conjunction with electronic circuits while producing improved physical properties and a high degree of crystallinity, involves variable frequency microwave (VFM) processing at temperatures typically 100° C. below the glass transition temperature or lower, for times of about 50 to 100 minutes. It is particularly applicable to polymers based on BPDA-PPD, but may also be generally applied to other intentionally designed polyimide structures with the same features. The invention enables the creation of layered structures involving integrated circuits with small feature sizes and overcoatings of polymers with high Tg and other desirable properties.
    Type: Application
    Filed: January 14, 2019
    Publication date: May 16, 2019
    Inventor: ROBERT L. HUBBARD
  • Patent number: 10224258
    Abstract: A method for densifying thermoplastics, particularly polyimides, for use in conjunction with electronic circuits while producing improved physical properties and a high degree of crystallinity, involves variable frequency microwave (VFM) processing at temperatures typically 100° C. below the glass transition temperature or lower, for times of about 50 to 100 minutes. It is particularly applicable to polymers based on BPDA-PPD, but may also be generally applied to other intentionally designed polyimide structures with the same features. The invention enables the creation of layered structures involving integrated circuits with small feature sizes and overcoatings of polymers with high Tg and other desirable properties.
    Type: Grant
    Filed: March 22, 2013
    Date of Patent: March 5, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventor: Robert L. Hubbard
  • Patent number: 10139728
    Abstract: A method for curing photosensitive polyimide (PSPI) films includes the steps of: depositing a PSPI film on a selected substrate, and curing the film by microwave heating at a selected temperature from about 200 to 340° C. in a selected atmosphere containing an oxygen concentration from about 20 to 200,000 ppm. The process atmosphere may be static or flowing. The addition of oxygen improves the removal of acrylate residue and improves the Tg of the cured film, while the low processing temperature characteristic of the microwave process prevents the oxygen from damaging the polyimide backbone. The method may further include the steps of photopatterning and developing the PSPI film prior to curing. The process is particularly suitable for dielectric films on silicon for electronic applications.
    Type: Grant
    Filed: December 12, 2016
    Date of Patent: November 27, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Robert L. Hubbard, Iftikhar Ahmad
  • Publication number: 20170090284
    Abstract: A method for curing photosensitive polyimide (PSPI) films includes the steps of: depositing a PSPI film on a selected substrate, and curing the film by microwave heating at a selected temperature from about 200 to 340° C. in a selected atmosphere containing an oxygen concentration from about 20 to 200,000 ppm. The process atmosphere may be static or flowing. The addition of oxygen improves the removal of acrylate residue and improves the Tg of the cured film, while the low processing temperature characteristic of the microwave process prevents the oxygen from damaging the polyimide backbone. The method may further include the steps of photopatterning and developing the PSPI film prior to curing. The process is particularly suitable for dielectric films on silicon for electronic applications.
    Type: Application
    Filed: December 12, 2016
    Publication date: March 30, 2017
    Inventors: ROBERT L. HUBBARD, IFTIKHAR AHMAD
  • Patent number: 9519221
    Abstract: A method for curing photosensitive polyimide (PSPI) films includes the steps of: depositing a PSPI film on a selected substrate, and curing the film by microwave heating at a selected temperature from about 200 to 340° C. in a selected atmosphere containing an oxygen concentration from about 20 to 200,000 ppm. The process atmosphere may be static or flowing. The addition of oxygen improves the removal of acrylate residue and improves the Tg of the cured film, while the low processing temperature characteristic of the microwave process prevents the oxygen from damaging the polyimide backbone. The method may further include the steps of photopatterning and developing the PSPI film prior to curing. The process is particularly suitable for dielectric films on silicon for electronic applications.
    Type: Grant
    Filed: January 12, 2015
    Date of Patent: December 13, 2016
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Robert L. Hubbard, Iftikhar Ahmad
  • Patent number: 9508616
    Abstract: A method for forming a multilayer structure comprises the steps of: depositing a first polymerizable layer on a substrate; applying microwave energy to the polymerizable layer while monitoring at least one property of the layer; and, ending the application of microwave energy when the monitored property indicates that the polymerizable layer has reached a desired degree of cure. The property monitored may be optical, e.g., Raman spectrum, or electrical, e.g., dielectric loss. This process control strategy lowers the overall thermal budget, and is especially suitable for curing polymer films on silicon. The method may be used repetitively to cure multiple layers of polymeric material when a thicker film is needed.
    Type: Grant
    Filed: May 11, 2012
    Date of Patent: November 29, 2016
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Iftikhar Ahmad, Robert L. Hubbard
  • Publication number: 20150198890
    Abstract: A method for curing photosensitive polyimide (PSPI) films includes the steps of: depositing a PSPI film on a selected substrate, and curing the film by microwave heating at a selected temperature from about 200 to 340° C. in a selected atmosphere containing an oxygen concentration from about 20 to 200,000 ppm. The process atmosphere may be static or flowing. The addition of oxygen improves the removal of acrylate residue and improves the Tg of the cured film, while the low processing temperature characteristic of the microwave process prevents the oxygen from damaging the polyimide backbone. The method may further include the steps of photopatterning and developing the PSPI film prior to curing. The process is particularly suitable for dielectric films on silicon for electronic applications.
    Type: Application
    Filed: January 12, 2015
    Publication date: July 16, 2015
    Applicant: Applied Materials, Inc.
    Inventors: Robert L. Hubbard, Iftikhar Ahmad
  • Publication number: 20140284821
    Abstract: A method for densifying thermoplastics, particularly polyimides, for use in conjunction with electronic circuits while producing improved physical properties and a high degree of crystallinity, involves variable frequency microwave (VFM) processing at temperatures typically 100° C. below the glass transition temperature or lower, for times of about 50 to 100 minutes. It is particularly applicable to polymers based on BPDA-PPD, but may also be generally applied to other intentionally designed polyimide structures with the same features. The invention enables the creation of layered structures involving integrated circuits with small feature sizes and overcoatings of polymers with high Tg and other desirable properties.
    Type: Application
    Filed: March 22, 2013
    Publication date: September 25, 2014
    Inventor: Robert L. Hubbard
  • Publication number: 20130299953
    Abstract: A multilayer structure comprises: a substrate; and, a plurality of polymerizable layers successively deposited on the substrate, with each successive layer having a greater dielectric polarizability than the preceding layer(s), so that each successive layer will absorb microwave energy preferentially to the preceding layer(s). In this way, successive layers can be cured without over-curing the preceding layers. The individual layers are preferably materials from a single chemical family (e.g., epoxies, polyimides, PBO, etc.) and have similar properties after curing. The dielectric polarizabilities may be adjusted by modifying such factors as chain endcap dipole strength, cross-linker dipole strength, promoter, solvent, and backbone type. The invention is particularly suitable for producing various polymer layers on silicon for electronic applications. An associated method is also disclosed.
    Type: Application
    Filed: May 11, 2012
    Publication date: November 14, 2013
    Inventors: Robert L. Hubbard, Iftikhar Ahmad
  • Patent number: 7045390
    Abstract: A stacked die package is formed by stiffening a flexible substrate, arranging a chip mounting pattern on one side of the substrate, and mounting chips according to the arranged pattern. A solder ball array on the opposite side of the substrate is routed to the chips, and the flexible substrate and stiffener are folded to align the chips in the stacked die package. The stiffener is removed by a single saw cut.
    Type: Grant
    Filed: April 15, 2003
    Date of Patent: May 16, 2006
    Assignee: Medtronic, Inc.
    Inventors: Juan G. Milla, Robert L. Hubbard
  • Patent number: 6991961
    Abstract: A method for forming a high voltage component package, which includes providing a flexible non-conductive substrate, forming a conductive layer on the substrate, and forming a circuit trace from the conductive layer, the circuit trace having frangible leads. A first side of a component overlies at least a portion of the circuit trace, and the component is coupled to the circuit trace by breaking a frangible lead on the trace and bonding the lead to the component. The flexible substrate is then bent or folded such that another portion of the circuit trace is in proximity to a second side of the component. The trace is coupled to the second side of the component either with a conductive adhesive or by bonding with another frangible trace.
    Type: Grant
    Filed: June 18, 2003
    Date of Patent: January 31, 2006
    Assignee: Medtronic, Inc.
    Inventors: Robert L. Hubbard, Juan G. Milla
  • Publication number: 20040259289
    Abstract: A method for forming a high voltage component package, which includes providing a flexible non-conductive substrate, forming a conductive layer on the substrate, and forming a circuit trace from the conductive layer, the circuit trace having frangible leads. A first side of a component overlies at least a portion of the circuit trace, and the component is coupled to the circuit trace by breaking a frangible lead on the trace and bonding the lead to the component. The flexible substrate is then bent or folded such that another portion of the circuit trace is in proximity to a second side of the component. The trace is coupled to the second side of the component either with a conductive adhesive or by bonding with another frangible trace.
    Type: Application
    Filed: June 18, 2003
    Publication date: December 23, 2004
    Applicant: Medtronic, Inc.
    Inventors: Robert L. Hubbard, Juan G. Milla
  • Publication number: 20030180987
    Abstract: A stacked die package is formed by stiffening a flexible substrate, arranging a chip mounting pattern on one side of the substrate, and mounting chips according to the arranged pattern. A solder ball array on the opposite side of the substrate is routed to the chips, and the flexible substrate and stiffener are folded to align the chips in the stacked die package. The stiffener is removed by a single saw cut.
    Type: Application
    Filed: April 15, 2003
    Publication date: September 25, 2003
    Applicant: Medtronic, Inc.
    Inventors: Juan G. Milla, Robert L. Hubbard
  • Publication number: 20020121693
    Abstract: A stacked die package is formed by stiffening a flexible substrate, arranging a chip mounting pattern on one side of the substrate, and mounting chips according to the arranged pattern. A solder ball array on the opposite side of the substrate is routed to the chips, and the flexible substrate and stiffener are folded to align the chips in the stacked die package. The stiffener is removed by a single saw cut.
    Type: Application
    Filed: December 11, 2000
    Publication date: September 5, 2002
    Inventors: Juan G. Milla, Robert L. Hubbard
  • Patent number: 6168973
    Abstract: A stacked semiconductor device is formed with a first mounting substrate, e.g., a single metal layer die tape, having a first semiconductor die attached thereto and a second mounting substrate, e.g., a double metal layer die tape having a second semiconductor die attached thereto. Substantially columnar solder connections, each formed from two solder balls are used to stack the first mounting substrate and the second mounting substrate such that the second semiconductor die is positioned between the mounting substrates. For example, identical memory dice may be stacked in this manner or different types of die such as a processor die and a memory die may be stacked in this manner for use in implantable medical apparatus.
    Type: Grant
    Filed: April 15, 1999
    Date of Patent: January 2, 2001
    Assignee: Medtronic, Inc.
    Inventor: Robert L. Hubbard
  • Patent number: 6051887
    Abstract: A stacked semiconductor device is formed with a first mounting substrate, e.g., a single metal layer die tape, having a first semiconductor die attached thereto and a second mounting substrate, e.g., a double metal layer die tape having a second semiconductor die attached thereto. Substantially columnar solder connections, each formed from two solder balls are used to stack the first mounting substrate and the second mounting substrate such that the second semiconductor die is positioned between the mounting substrates. For example, identical memory dice may be stacked in this manner or different types of die such as a processor die and a memory die may be stacked in this manner for use in implantable medical apparatus.
    Type: Grant
    Filed: August 28, 1998
    Date of Patent: April 18, 2000
    Assignee: Medtronic, Inc.
    Inventor: Robert L. Hubbard
  • Patent number: 4729639
    Abstract: A twisted nematic liquid crystal material used in a dual-frequency addressable liquid crystal cell is disclosed. Specific materials include an eutectic mixture of 2-5 monoester compounds having the formula R--X--Y--CO.sub.2 --Z--R', wherein R and R' is a straight alkyl having 2-7 carbon atoms and where each of X, Y and Z is a phenyl or trans-cyclohexyl and at least one of X, Y and Z is a trans-cyclohexyl. Also included are up to 25 weight percent of dopants to reduce viscosity and up to 10 weight percent of additives to lower the cross-over frequency, the additives being of the formula: ##STR1## wherein X is selected from the group consisting of: ##STR2## wherein R is a straight alkyl having 2-7 carbon atoms.
    Type: Grant
    Filed: April 24, 1984
    Date of Patent: March 8, 1988
    Assignee: Tektronix, Inc.
    Inventor: Robert L. Hubbard
  • Patent number: D305384
    Type: Grant
    Filed: January 12, 1987
    Date of Patent: January 9, 1990
    Assignee: Americal Corporation
    Inventor: Robert L. Hubbard