Abstract: The present invention provides a stable liquid, aqueous enzyme detergent comprising a mixture of nonionic and anionic surfactants, enzymes and a calcium ion source as an enzyme stabilizer, wherein phase instability is prevented by the use of an alkyl ether carboxylate as a phase stabilizer. This material also surprisingly enhances enzyme stability and imparts additional detergency performance to the liquid detergents. Standard adjuncts may be added to the compositions of this invention.

Abstract: A piezo-resistive pressure sensor element is formed in the front face of a silicon wafer. A thin diaphragm is formed under the sensing element by anisotropically etching a cavity from the rear face of the wafer. The rear face (cavity-side) rupture pressure of the silicon diaphragm is at least doubled by subjecting the anisotropically etched cavity to a mild isotropic etch. This substantially improves the cavity-side over-pressure rating of the finished pressure sensor without any significant change in the device sensitivity or allows higher sensitivity to be obtained for the same over-pressure rating or intermediate combinations thereof.