Patents by Inventor Robert Lyle Benner

Robert Lyle Benner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing pad conditioning system
    Patent number: 6508697
    Abstract: A system for conditioning rotatable polishing pads used to planarize and polish surfaces of thin film integrated circuits deposited on semiconductor wafer substrates, microelectronic, and optical system. The system has a pad conditioning apparatus, process fluids, a vacuum capability to pull waste material out of the conditioning pad, self-contained flushing means, and a piezo-electric device for vibrating the pad conditioning apparatus.
    Type: Grant
    Filed: July 16, 2001
    Date of Patent: January 21, 2003
    Inventors: Robert Lyle Benner, Stephen J. Benner, Robert L. Benner
  • POLISHING PAD CONDITIONING SYSTEM
    Publication number: 20030013381
    Abstract: A system for conditioning rotatable polishing pads used to planarize and polish surfaces of thin film integrated circuits deposited on semiconductor wafer substrates, microelectronic, and optical system. The system has a pad conditioning apparatus, process fluids, a vacuum capability to pull waste material out of the conditioning pad, self-contained flushing means, and a piezo-electric device for vibrating the pad conditioning apparatus.
    Type: Application
    Filed: July 16, 2001
    Publication date: January 16, 2003
    Inventors: Robert Lyle Benner, Stephen J. Benner, Robert L. Benner