Patents by Inventor Robert M. Mack

Robert M. Mack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control over etching molecule levels in etching compositions
    Patent number: 9677998
    Abstract: A method of detecting and measuring the presence of ammonium fluoride in a buffered oxide etchant (“BOE”) composition is provided.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: June 13, 2017
    Assignee: ECOLAB USA INC.
    Inventors: Amy M. Tseng, Brian V. Jenkins, Robert M. Mack
  • CONTROL OVER ETCHING MOLECULE LEVELS IN ETCHING COMPOSITIONS
    Publication number: 20160178507
    Abstract: The invention is directed towards methods and compositions for identifying the amount of hydrofluoric acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of hydrofluoric acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of hydrofluoric acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the hydrofluoric acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.
    Type: Application
    Filed: December 18, 2014
    Publication date: June 23, 2016
    Applicant: ECOLAB USA INC.
    Inventors: Amy M. Tseng, Brian V. Jenkins, Robert M. Mack
  • Control over ammonium fluoride levels in oxide etchant
    Patent number: 8932874
    Abstract: The invention is directed towards methods and compositions for identifying the amount of ammonium acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of ammonium acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of ammonium acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the ammonium acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.
    Type: Grant
    Filed: July 2, 2014
    Date of Patent: January 13, 2015
    Assignee: Nalco Company
    Inventors: Amy M. Tseng, Brian V. Jenkins, Robert M. Mack
  • CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT
    Publication number: 20140315320
    Abstract: The invention is directed towards methods and compositions for identifying the amount of hydrofluoric acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of hydrofluoric acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of hydrofluoric acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the hydrofluoric acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.
    Type: Application
    Filed: July 2, 2014
    Publication date: October 23, 2014
    Applicant: NALCO COMPANY
    Inventors: Amy M. Tseng, Brian V. Jenkins, Robert M. Mack
  • Control over hydrogen fluoride levels in oxide etchant
    Patent number: 8716028
    Abstract: The invention is directed towards methods and compositions for identifying the amount of hydrofluoric acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of hydrofluoric acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of hydrofluoric acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the hydrofluoric acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.
    Type: Grant
    Filed: December 31, 2012
    Date of Patent: May 6, 2014
    Assignee: Nalco Company
    Inventors: Amy Tseng, Brian V. Jenkins, Robert M. Mack