Patents by Inventor Robert M. Mark

Robert M. Mark has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wireless substrate-like teaching sensor for semiconductor processing
    Patent number: 11468590
    Abstract: A wireless substrate-like sensor for teaching transfer coordinates to a robotic substrate handling system is provided. The sensor includes a base portion sized and shaped like a substrate handled by the robotic substrate handling system. An electronics housing is coupled to the base portion. A power module is disposed within the electronics housing and configured to power components of the sensor. At least one edge camera is disposed near an edge of the base portion. The at least one edge camera has a field of view that images an alignment feature of the object within the field of view of the at least one edge camera of the wireless substrate-like sensor. A controller is disposed within the electronics housing and is coupled to the at least one edge camera. The controller is configured to obtain an image from the at least one edge camera and determine a location of the alignment feature and provide the determined location to the robotic substrate handling system.
    Type: Grant
    Filed: April 19, 2019
    Date of Patent: October 11, 2022
    Assignee: CyberOptics Corporation
    Inventors: Ferris J. Chen, David W. Duquette, Robert M. Mark
  • WIRELESS SUBSTRATE-LIKE TEACHING SENSOR FOR SEMICONDUCTOR PROCESSING
    Publication number: 20190325601
    Abstract: A wireless substrate-like sensor for teaching transfer coordinates to a robotic substrate handling system is provided. The sensor includes a base portion sized and shaped like a substrate handled by the robotic substrate handling system. An electronics housing is coupled to the base portion. A power module is disposed within the electronics housing and configured to power components of the sensor. At least one edge camera is disposed near an edge of the base portion. The at least one edge camera has a field of view that images an alignment feature of the object within the field of view of the at least one edge camera of the wireless substrate-like sensor. A controller is disposed within the electronics housing and is coupled to the at least one edge camera. The controller is configured to obtain an image from the at least one edge camera and determine a location of the alignment feature and provide the determined location to the robotic substrate handling system.
    Type: Application
    Filed: April 19, 2019
    Publication date: October 24, 2019
    Inventors: Ferris J. Chen, David W. Duquette, Robert M. Mark