Abstract: An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.

Abstract: An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.

Abstract: A substrate handler for use in a chamber in a vacuum processing system has a single motor for controlling the substrate handler's rotation and extension functions. The single motor is connected to an operating assembly that operates in two modes to alternatively rotate or extend the substrate handler. The two modes are defined by the relative rotational motion of two drive mechanisms that are rotated by the single motor. When the relative rotational motion for the two drive mechanisms is in the same axial direction, then the operating assembly operates in the first mode. When the relative rotational motion for the two drive mechanisms is in the opposite axial direction, then the operating assembly operates in the second mode. The single motor operates one of the drive mechanisms and an assembly that alternatively operates the other drive mechanism in either the same or the opposite axial direction as the first drive mechanism.