Patents by Inventor Robert M. Symons

Robert M. Symons has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer carrier modification for reduced extraction force
    Patent number: 6281128
    Abstract: The present invention provides a wafer carrier for use with a semiconductor wafer polishing apparatus. In one embodiment, the wafer carrier comprises a carrying head having opposing first and second surfaces, a primary channel system formed in the second surface, and a secondary channel system formed in the second surface. The first surface is coupleable to the semiconductor polishing apparatus and the second surface is adapted to receive a semiconductor wafer to be polished. The primary channel system comprises first and second intersecting channels. The secondary channel system intersects the primary channel system so that the secondary channel system and the primary channel system cooperate to occupy a substantial portion of a surface area of the second surface. Therefore, the primary channel system and the secondary channel system decrease an amount of force required to remove the semiconductor wafer from the second surface.
    Type: Grant
    Filed: June 14, 1999
    Date of Patent: August 28, 2001
    Assignee: Agere Systems Guardian Corp.
    Inventors: Alvaro Maury, John A. Maze, Frank Miceli, Jose Omar Rodriguez, Robert M. Symons