Patents by Inventor Robert M{umlaut over (u)}eller

Robert M{umlaut over (u)}eller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Model based method for wafer temperature control in a thermal processing system for semiconductor manufacturing
    Patent number: 6169271
    Abstract: A method for controlling wafer temperature in a thermal reactor. A wafer is positioned between two or more surfaces, one or more of which are heated. A control temperature is calculated based on the temperatures of the surfaces. The heat applied to the surface(s) is adjusted in response to the control temperature in order to maintain the wafer temperature within narrowly defined limits.
    Type: Grant
    Filed: July 12, 1999
    Date of Patent: January 2, 2001
    Assignee: Mattson Technology, Inc.
    Inventors: Stephen E. Savas, Martin L. Hammond, Robert M{umlaut over (u)}eller, Jean-François Daviet