Patents by Inventor Robert M. Whelton

Robert M. Whelton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Retro-etch process for forming gate electrodes of MOS integrated circuits
    Patent number: 4334348
    Abstract: A method of electrically isolating a plurality of semiconductor integrated circuit components and for forming gate elements for silicon gate transistors is disclosed whereby extremely narrow line widths can be formed which heretofore have been unattainable by practicing conventional photolithography.
    Type: Grant
    Filed: March 5, 1981
    Date of Patent: June 15, 1982
    Assignee: Data General Corporation
    Inventors: Dale T. Trenary, Allen H. Frederick, Robert M. Whelton
  • Retro-etch process for integrated circuits
    Patent number: 4318759
    Abstract: A method of electrically isolating a plurality of semiconductor integrated circuit components and for forming gate elements for silicon gate transistors is disclosed whereby extremely narrow line widths can be formed which heretofore have been unattainable by practicing conventional photolithography.
    Type: Grant
    Filed: July 21, 1980
    Date of Patent: March 9, 1982
    Assignee: Data General Corporation
    Inventors: Dale T. Trenary, Allen H. Frederick, Robert M. Whelton