Abstract: A microscope control unit includes at least one connection which is connectable to one or more electrically addressable microscope components or other electrically controllable components. At least one connection parameter of the at least one connection is programmatically configurable. At least one script with script commands is provided on the microscope control unit. At least one terminal is addressable by the script commands.

Abstract: A microscope control unit includes at least one connection which is connectable to one or more electrically addressable microscope components or other electrically controllable components. At least one connection parameter of the at least one connection is programmatically configurable. At least one script with script commands is provided on the microscope control unit. At least one terminal is addressable by the script commands.

Abstract: A microscope includes an illumination device having a light source and two current control devices. Each of the current control devices has a target value input and a measuring resistor arrangement. The current control devices supply a through-current for the light source and control a level thereof by way of a potential difference across the measuring resistor arrangement on the basis of a signal provided at the target value input. An adjustment device is configured to set two different illumination types of the microscope. The adjustment device and the illumination device are operatively connected to each other such that setting a first illumination type switches the illumination device into a first current configuration, in which at least one current control device supplies no through-current, and setting a second illumination type switches the illumination device into a second current configuration, in which at least one control devices supplies a through-current.

Abstract: A device and method for inspecting an object (2) uses a bright field illumination beam path (4) of a bright field light source (5), said beam path being formed so that it passes through the projection optics (3), and a dark field illumination beam path (6) of a dark field light source (7), this beam path being formed so that it also passes through the projection optics (3). The object (2) can be projected by the projection optics (3) onto the least one detector (8), and the object (2) is simultaneously illuminated by both light sources (5, 7). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the light used for the dark field illumination is pulsed and the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.

Abstract: The invention is based on an apparatus and a method for scanning specimens (1) using an optical imaging system (3) and a scanning stage (2), images of the specimen (1) being acquired by means of a camera (4), and/or measurements on the specimen (1) being made by means of an optical measurement device (5), at specimen points Xp, Yp. For that purpose, the scanning stage (2) is calibrated by obtaining and storing height values Z at different calibration positions X, Y of the scanning stage (2), and thereby generating a running height profile of the scanning stage (2). For the scanning of specimens (1), the specimen height positions Zp at specimen points Xp, Yp are determined by means of a reference height Zref of the specimen (1) together with the running height profile of the scanning stage (2).

Abstract: The invention relates to a device and method for inspecting an object (2) involving the use of a bright field illumination beam path (4) of a bright field light source (5), said beam path being formed so that it passes through the projection optics (3), and involving the use or a dark field illumination beam path (6) of a dark field light source (7), this beam path being formed so that it also passes through the projection optics (3). The object (2) can be projected by the projection optics (3) onto the least one detector (8), and the object (2) is simultaneously illuminated by both light sources (5, 7).

Abstract: An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

Abstract: The invention is based on an apparatus and a method for scanning specimens (1) using an optical imaging system (3) and a scanning stage (2), images of the specimen (1) being acquired by means of a camera (4), and/or measurements on the specimen (1) being made by means of an optical measurement device (5), at specimen points Xp, Yp. For that purpose, the scanning stage (2) is calibrated by obtaining and storing height values Z at different calibration positions X, Y of the scanning stage (2), and thereby generating a running height profile of the scanning stage (2). For the scanning of specimens (1), the specimen height positions Zp at specimen points Xp, Yp are determined by means of a reference height Zref of the specimen (1) together with the running height profile of the scanning stage (2).

Abstract: An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

Abstract: A method for defect analysis of wafers and a defect analysis system are disclosed. The defect analysis system has an image processing unit and an optical scanning apparatus, which is a flatbed scanner.

Abstract: The invention concerns an apparatus for grasping and transporting wafers (1), having a two-armed grasping apparatus (7), pivotable about a central rotation point (13), at whose two free ends grasping/retaining elements (12) equipped with vacuum suction devices (11) are arranged. In order to make available an apparatus of the kind cited initially, as well as a transport arrangement equipped with such an apparatus, that make possible faster transport of the wafers (1) without long dead times and thus permit an increase in overall throughput, it is proposed according to the present invention that the two arms (10) of the grasping apparatus (7) be angled with respect to one another at an angle (&agr;) 90°<&agr;<180°. The invention furthermore concerns a complete transport arrangement equipped with such an apparatus, as well as a method for operating said transport arrangement.

Abstract: A method and an apparatus for driving a stepping motor is provided. Digital desired current values are stored in the form of a sine table and are read from the sine table at a constant sampling frequency. The intervals between the read-out table values can be varied equally and unequally. The digital desired current values are converted into discrete analog signals. A sinusoidal signal is reconstructed from the analog signals. A motor current for exciting a phase of the stepping motor is derived from the sinusoidal signal.