Abstract: A laser radar (LADAR) system is provided with amplitude-weighted spatial coherent processing. An amplitude-weighted sum of time domain signals arising from several detectors within a detector array is formed and used for range doppler processing. Weighting coefficients are chosen to be proportional to the signal amplitude present for each of the separate signals from each detector within the array. The amplitude coefficients are determined using target returned energy arising from a continuous wave (CW) porch portion of the transmitted waveform.

Abstract: A multi-channel faceplate 200, that in some embodiments is monolithic, is provided as a portion of a gas delivery system to a process chamber 100. At least two sets of gas pathways are disposed through a faceplate and allow for independent delivery of separate gases into a process chamber 100. In one embodiment, a first gas pathway, which includes a first set of vertical channels 226, is formed through the faceplate 200. A second gas pathway includes a second set of vertical channels 228, which is formed through a portion of the faceplate and connected to a set of interconnecting horizontal channels 222 in the faceplate 200, where the second gas pathway maintains fluidic separation from the first gas pathway, prior to the gases entering the process chamber 100.